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No. Publication Number Title Publication/Patent Number Publication/Patent Number Publication Date Publication Date
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1 US2020098541A1
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATION OF AN OBJECT
Publication/Patent Number: US2020098541A1 Publication Date: 2020-03-26 Application Number: 16/693,612 Filing Date: 2019-11-25 Inventor: Zeidler, Dirk   Schubert, Stefan   Assignee: Carl Zeiss Microscopy GmbH   IPC: H01J37/10 Abstract: A particle beam system includes a particle source to produce a first beam of charged particles. The particle beam system also includes a multiple beam producer to produce a plurality of partial beams from a first incident beam of charged particles. The partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams. The plurality of partial beams includes at least a first partial beam and a second partial beam. The particle beam system further includes an objective to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which a second partial beam is incident. The particle beam system also a detector system including a plurality of detection regions and a projective system.
2 US2020185185A1
PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE BEAM SYSTEM
Publication/Patent Number: US2020185185A1 Publication Date: 2020-06-11 Application Number: 16/706,431 Filing Date: 2019-12-06 Inventor: Essers, Erik   Assignee: Carl Zeiss Microscopy GmbH   IPC: H01J37/09 Abstract: A particle beam system for examining and processing an object includes an electron beam column and an ion beam column with a common work region, in which an object may be disposed and in which a principal axis of the electron beam column and a principal axis of the ion beam column meet at a coincidence point. The particle beam system further includes a shielding electrode that is disposable between an exit opening of the ion beam column and the coincidence point. The shielding electrode is able to be disposed closer to the coincidence point than the electron beam column.
3 EP2758824B1
TRANSILLUMINATION DEVICE AND METHOD FOR LIGHT MICROSCOPES, AND A MICROSCOPE SYSTEM
Publication/Patent Number: EP2758824B1 Publication Date: 2020-04-22 Application Number: 12756359.1 Filing Date: 2012-08-16 Inventor: Hein, Detlef   Laschke, Axel   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/08
4 EP3528029B1
MICROSCOPE
Publication/Patent Number: EP3528029B1 Publication Date: 2020-07-01 Application Number: 19160825.6 Filing Date: 2008-12-10 Inventor: Lippert, Helmut   Wolleschensky, Ralf   Rohrbach, Alexander   Fahrbach, Florian   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/10
5 US2020264419A1
STRUCTURED ILLUMINATION WITH OPTIMIZED ILLUMINATION GEOMETRY
Publication/Patent Number: US2020264419A1 Publication Date: 2020-08-20 Application Number: 16/498,639 Filing Date: 2018-03-02 Inventor: Diederich, Benedict   Wartmann, Rolf   Schadwinkel, Harald   Stoppe, Lars   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/14 Abstract: An object transfer function (201) for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization (250) is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function (202) for an optical unit.
6 US2020264422A1
MICROSCOPY METHOD FOR DETERMINING A CONTRAST IMAGE AND MICROSCOPE
Publication/Patent Number: US2020264422A1 Publication Date: 2020-08-20 Application Number: 15/774,493 Filing Date: 2016-11-04 Inventor: Kalkbrenner, Dr. Thomas   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/36 Abstract: A microscopy method, and a microscope for carrying out the method, in which an illumination radiation is directed through an object arranged in an object plane of a microscope, in order to image the object, image data of a first image of the object being acquired with a first configuration of the microscope and image data of a second image of the object being acquired with a second configuration of the microscope. Differences between the image data of the first image and the second image are determined and, in dependence on the determined differences, image data of a contrast image of the object is provided. In the first configuration, a phase mask that has at least one optical gradient transversely in relation to the optical axis of the microscope, by the effect of which a phase gradient of the illumination radiation passing through the phase mask is produced or can be produced, is arranged in an objective pupil of the microscope and, in the second configuration, the phase mask is removed from the objective pupil.
7 EP3033645B1
HIGH-RESOLUTION SCANNING MICROSCOPY
Publication/Patent Number: EP3033645B1 Publication Date: 2020-09-02 Application Number: 14744022.6 Filing Date: 2014-07-18 Inventor: Kleppe, Ingo   Novikau, Yauheni   Nieten, Christoph   Netz, Ralf   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00
8 US10615000B2
Electron beam microscope
Publication/Patent Number: US10615000B2 Publication Date: 2020-04-07 Application Number: 16/364,894 Filing Date: 2019-03-26 Inventor: Han, Luyang   Fober, Joerg   Meyer, Stefan   Berger, Wolfgang   Assignee: Carl Zeiss Microscopy GmbH   IPC: H01J37/244 Abstract: An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.
9 US10670387B2
Determining the position of an object in the beam path of an optical device
Publication/Patent Number: US10670387B2 Publication Date: 2020-06-02 Application Number: 15/324,474 Filing Date: 2015-07-10 Inventor: Stoppe, Lars   Husemann, Christoph   Sticker, Markus   Assignee: Carl Zeiss Microscopy GmbH   IPC: G01B11/14 Abstract: To determine a position of an object (100) parallel to the optical axis (120) of an optical device (1), the object (100) is illumined from a first illumination direction (210-1) and from a second illumination direction (210-2) and an image (230-1, 230-2) is acquired in each case. The position of the object (100) is determined based on a distance (250) between imaging locations of the object (220-1, 220-2) in the images (230-1, 230-2).
10 US10684221B2
Light microscope and method for determining a wavelength-dependent refractive index of a sample medium
Publication/Patent Number: US10684221B2 Publication Date: 2020-06-16 Application Number: 15/769,286 Filing Date: 2016-10-11 Inventor: Bergter, Annette   Lippert, Helmut   Assignee: Carl Zeiss Microscopy GmbH   IPC: G01N21/41 Abstract: With the method of the invention a wavelength-dependent refractive index of a specimen medium, which is examined with a light microscope, is determined. With the light microscope, a specimen measurement at the specimen medium which has an unknown refractive index is performed, wherein illumination light is radiated to the specimen medium and detection light coming from the specimen medium is measured. With the specimen measurement, a specimen measurement focus position of the illumination and/or detection light is measured. Using a mathematical model, in which a focus position of illumination and/or detection light is defined in dependence of a refractive index of a medium, the refractive index of the specimen medium is derived from the specimen measurement focus position. Furthermore, a light microscope for carrying out the method is described.
11 US10746657B2
Method for accelerated high-resolution scanning microscopy
Publication/Patent Number: US10746657B2 Publication Date: 2020-08-18 Application Number: 16/289,892 Filing Date: 2019-03-01 Inventor: Bathe, Wolfgang   Assignee: Carl Zeiss Microscopy GmbH   IPC: G01N21/69 Abstract: In a method for high-resolution scanning microscopy of a sample, provision is made of focusing of illumination radiation into an illumination spot in or on the sample and stimulating the emission of detection radiation at a sample spot that coincides with the illumination spot. The sample spot is imaged into an image that is static on a spatially resolving surface detector having pixels of a size that spatially resolve the image, wherein the imaging has a an optical imaging resolution limit. The entire sample is captured by performing a scanning movement of the illumination spot and of the coinciding sample spot over the sample in a scanning operation. An image of the sample having a resolution that is increased beyond the optical imaging resolution limit of the imaging is produced from the data of the pixels for each scanning position.
12 US2020088984A1
METHOD FOR GENERATING AND ANALYZING AN OVERVIEW CONTRAST IMAGE
Publication/Patent Number: US2020088984A1 Publication Date: 2020-03-19 Application Number: 16/618,773 Filing Date: 2018-05-15 Inventor: Haase, Daniel   Ohrt, Thomas   Sticker, Markus   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/12 Abstract: A method for generating and analyzing an overview contrast image of a specimen carrier and/or of specimens situated on a specimen carrier. A specimen carrier arranged at least partially in the focus of a detection optical unit is illuminated in transmitted light using a two-dimensional, array-like illumination pattern. At least two overview raw images are detected using different illuminations of the specimen carrier, and, according to information to be extracted from the overview contrast image, a combination algorithm is selected by means of which the at least two overview raw images are combined to form the overview contrast image. According to information to be extracted from the overview contrast image, an image evaluation algorithm is selected by means of which the information is extracted.
13 US2020110254A1
MICROSCOPE AND METHOD FOR MICROSCOPIC IMAGING OF AN OBJECT
Publication/Patent Number: US2020110254A1 Publication Date: 2020-04-09 Application Number: 16/495,748 Filing Date: 2018-03-14 Inventor: Goegler, Michael   Ohrt, Thomas   Sticker, Markus   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/36 Abstract: A microscope for imaging an object, comprising a lens assembly, which defines an optical axis and a focal plane perpendicular thereto, and correction optics, which are adjustable for adjustment to a depth position and which correct a spherical aberration on the lens assembly which occurs during imaging of the object at a specific depth position of the focal plane. The microscope may be used to determine a phase difference of radiation from a first lateral region and a second lateral region of the object, and to use a previously known connection between the phase difference and a modification of the spherical aberration caused thereby in order to determine an adjustment value of the correction optics, such that the spherical aberration is reduced when imaging the second region.
14 US2020073102A1
MICROSCOPE SYSTEM AND METHOD FOR TIME CONTROLLING PROCESSES IN A MICROSCOPE SYSTEM
Publication/Patent Number: US2020073102A1 Publication Date: 2020-03-05 Application Number: 16/610,009 Filing Date: 2018-04-30 Inventor: Liedtke, Mirko   KÜhm, Andreas   Presser, Nico   Roscher, Burkhard   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00 Abstract: A method for timing procedures in a microscope system, which has a plurality of microscope modules configured to carry out various processes, provision is made for a clock signal to be provided to all microscope modules by a central clock generator and for the clock signal to be modulated by a clock modulation circuit in order to produce a defined clock-pulse number. The microscope modules define a start time for carrying out a process by way of the clock-pulse number, carrying out the process as soon as the clock-pulse number is reached. Moreover, a corresponding microscope system is described.
15 US2020026050A1
Assembly for Increasing the Resolution of a Laser Scanning Microscope
Publication/Patent Number: US2020026050A1 Publication Date: 2020-01-23 Application Number: 16/481,795 Filing Date: 2018-01-25 Inventor: Wicker, Kai   Netz, Ralf   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00 Abstract: An arrangement for increasing resolution of a laser scanning microscope has a simplified adjustment and lower susceptibility to errors. The pupil beam from the laser scanning microscope is coupled into a shortened common path interferometer, to make wavefronts of a pupil image mirrored at at least one axis and wavefronts of an unchanged pupil image interfere. The area of a pupil from the pupil beam is split into two complementary portions P and Q producing two partial beams separately supplied to at least one beam deflection means by total-internal reflection along the common path interferometer. The light of the interferometer branches from transmitted light of the one interferometer branch and reflected light of the other interferometer branch is made to interfere at a partly transmissive beam splitter layer to cause constructive interference C and destructive interference D of the wavefronts from the two different portions P and Q of the pupil.
16 US2020035444A1
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
Publication/Patent Number: US2020035444A1 Publication Date: 2020-01-30 Application Number: 16/459,212 Filing Date: 2019-07-01 Inventor: Nicoletti, Michele   Biberger, Josef   Assignee: Carl Zeiss Microscopy GmbH   IPC: H01J37/20 Abstract: The disclosure relates to a receptacle device for receiving and preparing a microscopic sample. The receptacle device is mountable onto a sample stage. The sample stage is arranged in a sample chamber of a microscope system and is movable by way of an open kinematic chain of rotational or rotational and translational elements. The last rotational element of the open kinematic chain is arranged such that it is rotatable about an axis R1. The receptacle device has an axis R2, about which the receptacle device is arranged such that it is rotatable. The axis R2 is arranged at an angle α relative to the axis R1. The angle α assumes a value in the range of 10° to 80°. By rotation of the receptacle device about the axis R2, the receptacle device can adopt at least a first position and a second position.
17 US2020211810A1
APPARATUS FOR GENERATING A MULTIPLICITY OF PARTICLE BEAMS, AND MULTI-BEAM PARTICLE BEAM SYSTEMS
Publication/Patent Number: US2020211810A1 Publication Date: 2020-07-02 Application Number: 16/725,944 Filing Date: 2019-12-23 Inventor: Zeidler, Dirk   Assignee: Carl Zeiss Microscopy GmbH   IPC: H01J37/10 Abstract: An apparatus for generating a multiplicity of particle beams includes a particle source, a first multi-aperture plate with a multiplicity of openings, a second multi-aperture plate with a multiplicity of openings, a first particle lens, a second particle lens, a third particle lens 23, and a controller, which supplies each of the first particle lens, the second particle lens and the third particle lens with an adjustable excitation.
18 US2020218047A1
HIGH-RESOLUTION SCANNING MICROSCOPY
Publication/Patent Number: US2020218047A1 Publication Date: 2020-07-09 Application Number: 16/732,585 Filing Date: 2020-01-02 Inventor: Kleppe, Ingo   Novikau, Yauheni   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00 Abstract: The invention relates to a method for high-resolution scanning microscopy of a sample M which a) the sample is illuminated at a point in or on the sample by means of illumination radiation, b) the point is imaged along an optical axis and according to a point spread function into a diffraction image on a spatially resolving surface detector that comprises detector pixels in which a diffraction structure of the diffraction image is resolved, c) the point is displaced relative to the sample in at least two scanning directions and pixel signals are read from the detector pixels in various scanning positions, wherein the pixel signals are respectively assigned to that scanning position at which they were read out and adjacent scanning positions overlap one another and are dis posed according to a scanning increment, d) an image of the sample having a resolution that is increased beyond a resolution limit of the imaging is generated from the read pixel signals and the assigned scanning positions, wherein a deconvolution is carried out in step d) on the basis of the read pixel signals and the assigned scanning positions and on the basis of the point spread function, wherein intermediate positions are generated for at least one of the scanning directions in the deconvolution on the basis of the pixel signals and the image of the sample, which contains more image points than scanning positions, is generated.
19 EP3614365A1
METHOD, APPARATUS AND COMPUTER-READABLE STORAGE MEDIUM FOR VISUAL TEACHING
Publication/Patent Number: EP3614365A1 Publication Date: 2020-02-26 Application Number: 19192733.4 Filing Date: 2019-08-21 Inventor: Hoffmann, Anton Andreas   Kaiser, Anja Christina   Ding, Weiming   Gu, Hailei   Assignee: Carl Zeiss Microscopy GmbH   IPC: G09B5/14 Abstract: A method, apparatus (1300) and computer-readable storage medium for visual teaching. The visual teaching method includes establishing a classroom (401, 402, 403), arranging the classroom (401, 402, 403) based on the real geometric layout of at least one teaching device (103) in the classroom (401, 402, 403), and conducting the course in the classroom (401, 402, 403) based on the arranged classroom (401, 402, 403), wherein the classroom (401, 402, 403) comprises at least one user smart terminal (102), at least one teaching device (103) and a management smart terminal (101) and/or a server (104), at least one teaching device (103) and/or at least one user smart terminal (102) being communicatively connected to the management smart terminal (101) and/or the server (104) operating the classroom (401, 402, 403), each of the user smart terminals (102) operating at least one corresponding teaching device (103) and obtaining the status of the corresponding teaching devices (103). The visual teaching solution provides a course-oriented and student-oriented visual teaching environment by combining the courses, teaching devices (103) and students (601).
20 EP3667391A1
MICROSCOPIC METHOD AND MICROSCOPE WITH IMPROVED RESOLUTION
Publication/Patent Number: EP3667391A1 Publication Date: 2020-06-17 Application Number: 20151281.1 Filing Date: 2010-10-22 Inventor: Kleppe, Ingo   Netz, Ralf   Novikau, Yauheni   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00 Abstract: Verfahren zur Steigerung der Auflösung eines Mikroskops bei der Detektion einer beleuchteten Probe und Mikroskop zur Durchführung des Verfahrens, wobei in einer ersten Position ein Beleuchtungsmuster auf der Probe erzeugt wird, dessen Auflösung vorzugsweise etwa in der Größenordnung der erreichbaren optischen Auflösung des Mikroskopes oder darüber liegt, wobei zwischen der Detektion und dem Beleuchtungsmuster mindestens einmal mit einer Schrittweite unterhalb der Auflösungsgrenze des Mikroskops eine Relativverschiebung, vorteilhaft senkrecht zur Beleuchtungsrichtuing, von einer ersten in mindestens eine zweite Position des Beleuchtungsmusters auf der Probe erzeugt wird und sowohl in der ersten als auch in der zweiten Position eine Detektion und Abspeicherung der Detektionssignale erfolgt.