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1
US2021001403A1
PROCESSING SYSTEM, PROCESSING METHOD, COMPUTER PROGRAM, RECORDING MEDIUM AND CONTROL APPARATUS
Publication/Patent Number: US2021001403A1 Publication Date: 2021-01-07 Application Number: 16/964,909 Filing Date: 2019-01-29 Inventor: Kawai, Hidemi   Assignee: NIKON CORPORATION   IPC: B22F3/105 Abstract: A processing system is provided with: a support apparatus that is configured to support a processing target; a processing apparatus that performs an additive processing by irradiating a processed area on the processing target with an energy beam and by supplying materials to an area that is irradiated with the energy beam; and a position change apparatus that changes a positional relationship between the support apparatus and an irradiation area of the energy beam from the processing apparatus, wherein the processing system forms a fiducial build object by performing the additive processing on at least one of a first area that is a part of the support apparatus and a second area that is a part of the processing target, and the processing system controls at least one of the processing apparatus and the position change apparatus by using an information relating to the fiducial build object.
2
US10885610B2
Image device, image processing device, and electronic apparatus
Publication/Patent Number: US10885610B2 Publication Date: 2021-01-05 Application Number: 16/082,877 Filing Date: 2017-03-29 Inventor: Kanbara, Toshiyuki   Shionoya, Takashi   Sekiguchi, Naoki   Assignee: NIKON CORPORATION   IPC: G06T5/00 Abstract: An imaging device includes: an image capture unit having a first image capture region that performs image capture under first image capture conditions, and a second image capture region that performs image capture under second image capture conditions that are different from the first image capture conditions; and a generation unit that generates an image of a photographic subject captured in the first image capture region according to image data for a photographic subject captured in the second image capture region.
3
US2021004939A1
IMAGE PROCESSING METHOD, PROGRAM, OPHTHALMIC DEVICE, AND CHOROIDAL BLOOD VESSEL IMAGE GENERATION METHOD
Publication/Patent Number: US2021004939A1 Publication Date: 2021-01-07 Application Number: 17/025,575 Filing Date: 2020-09-18 Inventor: Hirokawa, Mariko   Assignee: NIKON CORPORATION   IPC: G06T5/00 Abstract: An image processing method comprising acquiring a first fundus image obtained by photographing a fundus using first light having a first wavelength, and a second fundus image obtained by photographing the fundus using second light having a second wavelength that is shorter than the first wavelength; specifying, in the first fundus image, respective positions of retinal blood vessels appearing in the second fundus image; and generating a choroidal blood vessel image by processing the positions identified in the first fundus image.
4
US2021000343A1
DIAGNOSIS SUPPORT DEVICE, LEARNING DEVICE, DIAGNOSIS SUPPORT METHOD, LEARNING METHOD, AND PROGRAM
Publication/Patent Number: US2021000343A1 Publication Date: 2021-01-07 Application Number: 16/930,510 Filing Date: 2020-07-16 Inventor: Kurihara, Toshihide   Katada, Yusaku   Tsubota, Kazuo   Masayoshi, Kanato   Assignee: NIKON CORPORATION   IPC: A61B3/12 Abstract: A device for supporting diagnosis has: a reception unit that is configured to receive a fundus image of a subject eye; an identification unit provided with a trained model that is configured to recognize, in the fundus image of the subject eye, an area of abnormality in blood circulation, wherein the model has been trained based upon an image of a fundus and an area of abnormality in blood circulation specified in a fluorescent angiography image of the fundus; and an output unit that is configured to output information relating to the area of abnormality in blood circulation recognized in the fundus image of the subject eye.
5
US10884344B2
Positioning system using surface pattern recognition and interpolation
Publication/Patent Number: US10884344B2 Publication Date: 2021-01-05 Application Number: 15/669,661 Filing Date: 2017-08-04 Inventor: Coon, Paul Derek   Wells, Jonathan K.   Rosa, Matthew   Binnard, Michael   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.
6
US2021006727A1
FOCUS ADJUSTMENT DEVICE AND IMAGING APPARATUS
Publication/Patent Number: US2021006727A1 Publication Date: 2021-01-07 Application Number: 17/023,788 Filing Date: 2020-09-17 Inventor: Takahara, Hiroaki   Tomita, Hiroyuki   Assignee: NIKON CORPORATION   IPC: H04N5/232 Abstract: A focus adjustment device comprising: a first detector which detects a focused state by a contrast detection system; second detectors which detect a focused state by a phase difference detection system; and a control unit which controls the first detector and second detectors so as to detect the focused state by the second detectors when detecting the focused state by the first detector.
7
US2021002495A1
ITO PARTICLES, DISPERSION, AND PRODUCTION METHOD OF ITO FILM
Publication/Patent Number: US2021002495A1 Publication Date: 2021-01-07 Application Number: 16/928,855 Filing Date: 2020-07-14 Inventor: Muramatsu, Atsushi   Kanie, Kiyoshi   Suzuki, Ryoko   Nishi, Yasutaka   Nakazumi, Makoto   Assignee: TOHOKU UNIVERSITY   NIKON CORPORATION   IPC: C09D5/24 Abstract: Provided is ITO particles satisfying a relationship expressed in Expression (1) given below. 16×S/P2≤0.330 . . . (1) (In the expression, S indicates a particle area in a TEM photographed image, and P indicates a perimeter of the particle.)
8
US2021002494A1
ITO PARTICLES, DISPERSION, PRODUCTION METHOD OF ITO PARTICLES, PRODUCTION METHOD OF DISPERSION, AND PRODUCTION METHOD OF ITO FILM
Publication/Patent Number: US2021002494A1 Publication Date: 2021-01-07 Application Number: 16/928,833 Filing Date: 2020-07-14 Inventor: Muramatsu, Atsushi   Kanie, Kiyoshi   Suzuki, Ryoko   Assignee: TOHOKU UNIVERSITY   NIKON CORPORATION   IPC: C09D5/24 Abstract: Provided are ITO particles having a non-rectangular parallelepiped shape and an aligned crystal orientation inside particles.
9
US2021004563A1
METHODS AND DEVICES FOR LIVE CELL IMAGING ANALYSIS
Publication/Patent Number: US2021004563A1 Publication Date: 2021-01-07 Application Number: 16/933,758 Filing Date: 2020-07-20 Inventor: Rubin, Lee L.   Kiyota, Yasujiro   Nakada, Chieko   Niikura, Keiichi   Pfaff, Kathleen L.   Assignee: President and Fellows of Harvard College   Nikon Corporation   IPC: G06K9/00 Abstract: Provided herein are methods for analysis of target cells on a population or individual basis, including before and after contact with a stimulus in order to determine the effect of such stimulus on the target cells. Also provided are devices for performing such methods. The analysis methods involve identifying and measuring or tracking morphological changes that occur in target cells over a period of time. Tracking is accomplished using imaging systems capable of imaging target cells individually over a period of time either continuously or at discrete intervals of time.
10
WO2020003921A1
LENS BARREL
Publication/Patent Number: WO2020003921A1 Publication Date: 2020-01-02 Application Number: 2019022173 Filing Date: 2019-06-04 Inventor: Waizumi, Satoshi   Shimizu, Kunihiko   Koizumi, Takehiro   Assignee: NIKON CORPORATION   TOCHIGI NIKON CORPORATION   IPC: G03B17/14 Abstract: The present invention provides a lens barrel capable of increasing the moving range of a lens. A lens barrel 1 according to the present invention comprises: a lens retainer frame (10) for holding a lens; a drive unit (12) for driving the lens retainer frame along the optical axis direction; a first cylinder (9) that holds the drive unit and has a cam follower (9a); a second cylinder (5) that has a cam groove for engaging the cam follower; and a bias part (13) for biasing the first cylinder along the optical axis.
11
US10527815B2
Vibration actuator, and lens barrel and camera provided with same
Publication/Patent Number: US10527815B2 Publication Date: 2020-01-07 Application Number: 15/190,580 Filing Date: 2016-06-23 Inventor: Kobayashi, Mina   Inoue, Mamoru   Assignee: NIKON CORPORATION   IPC: H02N2/16 Abstract: A vibration actuator that is easy to manufacture and has good driving performance, and a lens-barrel and a camera provided with the same. The vibration actuator is provided with an oscillator that generates oscillations; and a relative movement member that is pressure contacts the oscillator, and moves relative to the oscillator due to the oscillation. Either a contact face of the oscillator with respect to the relative movement member or a contact face of the relative movement member with respect to the oscillator is a thermosetting resin film that is formed of polyamide-imide resin and fluororesin, and the other contact face is an anodic oxide film.
12
US10534277B2
Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method
Publication/Patent Number: US10534277B2 Publication Date: 2020-01-14 Application Number: 15/129,017 Filing Date: 2015-03-25 Inventor: Aoki, Yasuo   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: A substrate stage apparatus includes: a fine movement stage movable along the XY plane; an XY two-dimensional stage apparatus (an X beam and an X carriage) which guides the fine movement stage in a direction parallel to the XY plane; a plurality of weight-canceling devices movable in the direction parallel to the XY plane synchronously with the fine movement stage and also working together to support the weight of the fine movement stage; a first Y step guide provided at the +Y side of the X beam in a direction parallel to the Y-axis, that guides a part of the plurality of weight-canceling devices moving in a direction parallel to the X-axis; and a second Y step guide provided at the other side of the X beam in the direction parallel to the Y-axis, that guides the other part of the plurality of weight-canceling devices moving parallel to the X-axis.
13
US10531053B2
Image capturing device
Publication/Patent Number: US10531053B2 Publication Date: 2020-01-07 Application Number: 16/170,324 Filing Date: 2018-10-25 Inventor: Kita, Yuki   Assignee: NIKON CORPORATION   IPC: H04N9/04 Abstract: An image capturing device includes: a plurality of first pixels that have a plurality of color components, and that generate first signals by photoelectrically converting incident light; a plurality of second pixels that generate second signals by photoelectrically converting light that has passed through the first pixels; and a drive unit that reads out the first signals from the first pixels, and that reads out the second signals from the second pixels at timings that are different from timings of reading out the first signals.
14
US10585355B2
Exposure apparatus and exposure method, and flat panel display manufacturing method
Publication/Patent Number: US10585355B2 Publication Date: 2020-03-10 Application Number: 15/763,579 Filing Date: 2016-09-29 Inventor: Shimoyama, Takachika   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: A liquid crystal exposure apparatus has a measurement system having scales arranged apart from each other in the X-axis direction provided at a substrate stage holding a substrate and heads each irradiating the scales with a measurement beam; and a measurement device that measures positions of head units in the Y-axis direction. The measurement system measures a position of the substrate holder in directions of three degrees of freedom within a plane, based on measurement information of at least three heads. Each of the heads move off of one scale while the substrate holder is moved in the X-axis direction and moves to irradiate another scale adjacent to the one scale, and correction information to control movement of the substrate holder using the head moving to irradiate another scale is acquired, based on measurements of at least three heads.
15
US10591824B2
Illumination optical device, illumination method, and exposure method and device
Publication/Patent Number: US10591824B2 Publication Date: 2020-03-17 Application Number: 15/082,763 Filing Date: 2016-03-28 Inventor: Fujii, Toru   Assignee: NIKON CORPORATION   IPC: G02B27/28 Abstract: According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
16
US10788760B2
Movable body apparatus, exposure apparatus, and device manufacturing method
Publication/Patent Number: US10788760B2 Publication Date: 2020-09-29 Application Number: 16/449,977 Filing Date: 2019-06-24 Inventor: Shibazaki, Yuichi   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: A supporting member on which a wafer table is mounted is substantially kinematically supported, via six rod members placed on a slider. Further, coupling members are placed facing in a non-contact manner via a predetermined gap, thin plate-shaped edges provided at both ends in the Y-axis direction of the supporting member. By this arrangement, vibration-damping is performed by the coupling members (squeeze dampers) facing the edges, on vibration of the supporting member mounted on the wafer table. Further, because the supporting member is kinematically supported via the plurality of rod members, it becomes possible to reduce deformation of the wafer table that accompanies deformation of the slider.
17
US2020310253A1
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
Publication/Patent Number: US2020310253A1 Publication Date: 2020-10-01 Application Number: 16/879,142 Filing Date: 2020-05-20 Inventor: Kato, Masaki   Kiuchi, Tohru   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
18
US10757341B2
Electronic device, imaging device, and imaging element
Publication/Patent Number: US10757341B2 Publication Date: 2020-08-25 Application Number: 15/926,466 Filing Date: 2018-03-20 Inventor: Gohara, Koichi   Tsuchiya, Satoshi   Assignee: NIKON CORPORATION   IPC: H04N5/225 Abstract: An electronic device includes: an imaging unit including a region having a pixel group that has a plurality of first pixels, and second pixels that are fewer than the first pixels in the pixel group; and a control unit that reads out the signals based upon exposure of the second pixels during exposure of the plurality of first pixels.
19
US10613311B2
Three-dimensional drift control apparatus and microscope apparatus
Publication/Patent Number: US10613311B2 Publication Date: 2020-04-07 Application Number: 15/288,397 Filing Date: 2016-10-07 Inventor: Nishikawa, So   Assignee: NIKON CORPORATION   IPC: G02B21/36 Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.
20
US10747117B2
Extreme ultraviolet lithography system that utilizes pattern stitching
Publication/Patent Number: US10747117B2 Publication Date: 2020-08-18 Application Number: 16/379,010 Filing Date: 2019-04-09 Inventor: Binnard, Michael B.   Smith, Daniel Gene   Williamson, David M.   Assignee: NIKON CORPORATION   IPC: G03F7/20 Abstract: An extreme ultraviolet lithography system (10) that creates a pattern (230) having a plurality of densely packed parallel lines (232) on a workpiece (22) includes a patterning element (16); an EUV illumination system (12) that directs an extreme ultraviolet beam (13A) at the patterning element (16); a projection optical assembly (18) that directs the extreme ultraviolet beam diffracted off of the patterning element (16) at the workpiece (22); and a pattern blind assembly (26) positioned in a beam path (55) of the extreme ultraviolet beam (13A). The pattern blind assembly (26) shapes the extreme ultraviolet beam (13A) so that an exposure field (28) on the workpiece (22) has a polygonal shape.