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1 US2020041782A1
Scanner Arrangement for Optical Radiation
Publication/Patent Number: US2020041782A1 Publication Date: 2020-02-06 Application Number: 16/519,833 Filing Date: 2019-07-23 Inventor: Egloff thomas   Schroeter, Tobias   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B26/10 Abstract: A scanner arrangement, suitable for use in laser scanning microscopes, for scanning a scanning field (42) by means of optical radiation (5). It is equipped with at least one scanner (1), which comprises a scanning mirror (2) that is tiltable about one or two scanning axes (3, 4) and means for rotating the scanning field, for scanning a size-variable scanning field and for centring the scanning field centre (43) when panning. The arrangement includes a mechanical pivot device (7) for rotating the scanning field (42). The pivot device is arranged to pivot the scanner (1) about a pivot axis (8). Pivoting is implemented through angular dimensions that correspond to an intended rotation of the scanning field.
2 DE102018118699A1
Scanneranordnung für optische Strahlung
Publication/Patent Number: DE102018118699A1 Publication Date: 2020-02-06 Application Number: 102018118699 Filing Date: 2018-08-01 Inventor: Egloff thomas   Schröter, Tobias   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: G02B26/10 Abstract: Die Erfindung betrifft eine Scanneranordnung zur Abtastung eines Scanfeldes (42) mittels optischer Strahlung (5). Sie ist mit mindestens einem Scanner (1) ausgestattet, der einen um eine oder zwei Scanachsen (3,4) kippbaren Scanspiegel (2) aufweist, sowie mit Mitteln zur Drehung des Scanfeldes, zur Abtastung eines in seiner Größe veränderbaren Scanfeldes sowie zum Zentrieren der Scanfeldmitte (43) beim Panning. Die Scanneranordnung ist vorzugsweise für den Einsatz in Laser-Scanning-Mikroskopen geeignet.Zwecks Drehung des Scanfeldes (42) ist eine mechanische Schwenkeinrichtung (7) vorhanden, die zum Schwenken des Scanners (1), im speziellen Fall der Scanneranordnung, um eine Schwenkachse (8) ausgebildet ist. Das Schwenken erfolgt um Winkelmaße, die einer beabsichtigten Drehung des Scanfeldes entsprechen. Es sind Mittel zur Erzeugung und Steuerung von Offsets zwecks Kompensation eines Versatzes der Scanfeldmitte (43) infolge der Schwenkung vorgesehen.
3 US202041782A1
Scanner Arrangement for Optical Radiation
Publication/Patent Number: US202041782A1 Publication Date: 2020-02-06 Application Number: 20/191,651 Filing Date: 2019-07-23 Inventor: Egloff thomas   Schroeter, Tobias   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B26/10 Abstract: A scanner arrangement, suitable for use in laser scanning microscopes, for scanning a scanning field (42) by means of optical radiation (5). It is equipped with at least one scanner (1), which comprises a scanning mirror (2) that is tiltable about one or two scanning axes (3, 4) and means for rotating the scanning field, for scanning a size-variable scanning field and for centring the scanning field centre (43) when panning. The arrangement includes a mechanical pivot device (7) for rotating the scanning field (42). The pivot device is arranged to pivot the scanner (1) about a pivot axis (8). Pivoting is implemented through angular dimensions that correspond to an intended rotation of the scanning field.
4 US2020301121A1
METHOD FOR HIGH-RESOLUTION SCANNING MICROSCOPY
Publication/Patent Number: US2020301121A1 Publication Date: 2020-09-24 Application Number: 16/823,624 Filing Date: 2020-03-19 Inventor: Kalinin, Stanislav   Kudryavtsev, Volodymyr   Egloff thomas   Kolarow, Alexander   Engel, Joerg   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: G02B21/00 Abstract: A method for high-resolution scanning microscopy of a sample, wherein the sample is illuminated with illumination light such that the illumination light is focused at a point in or on the sample into an illumination spot. The point is imaged into a diffraction image onto an area detector having detector elements. The area detector has a spatial resolution that resolves a diffraction structure of the diffraction image. The sample is here scanned line-wise in a grid made of rows and columns by displacing the point relative to the sample into different scanning positions with an increment width that is smaller than the diameter of the illumination spot. The area detector is read, and an image of the sample is generated from the data of the area detector and from the scanning positions assigned to said data, said image having a resolution that is increased beyond a resolution limit for imaging.
5 EP3712670A1
METHOD FOR HIGH-RESOLUTION SCANNING MICROSCOPY
Publication/Patent Number: EP3712670A1 Publication Date: 2020-09-23 Application Number: 20162367.5 Filing Date: 2020-03-11 Inventor: Kalinin, Stanislav   Kudryavtsev, Volodymyr   Egloff thomas   Kolarow, Alexander   Engel, Jörg   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B21/00 Abstract: Die Erfindung betrifft ein Verfahren zur hochauflösenden Scanning-Mikroskopie einer Probe, wobei die Probe (P) mit Beleuchtungslicht (B) derart beleuchtet wird, dass das Beleuchtungslicht (B) an einem Punkt in oder auf der Probe (P) zu einem Beleuchtungsfleck (3) gebündelt wird. Der Punkt wirkt in ein Beugungsbild (15) auf einen Detektorelemente (19) aufweisenden Flächendetektor (13) abgebildet, wobei der Flächendetektor (13) durch seine Detektorelemente (19) eine Ortsauflösung aufweist, die eine Beugungsstruktur (16) des Beugungsbildes (15) auflöst. Die Probe (P) wird dabei in einem Raster aus Zeilen und Spalten zeilenweise abgetastet, indem der Punkt relativ zur Probe (P) in verschiedene Scanpositionen mit einer Schrittweite verschoben wird, die kleiner als der Durchmesser des Beleuchtungsflecks (3) ist. Der Flächendetektor (13) wird ausgelesen und aus den Daten des Flächendetektors (13) und aus den diesen Daten zugeordneten Scanpositionen wird ein Bild der Probe (P) erzeugt, welches eine Auflösung aufweist, die über eine Auflösungsgrenze der Abbildung gesteigert ist. Erfindungsgemäß wird für jede Zeile nach der Aufnahme ein vorverrechnetes Zeilenrohbild berechnet. Die vorverrechneten Zeilenrohbilder werden zu einem Rohbild zusammengefasst und entfaltet, um das Bild der Probe (P) zu erzeugen.
6 US2020294216A1
METHOD FOR REDUCING IMAGE ARTIFACTS
Publication/Patent Number: US2020294216A1 Publication Date: 2020-09-17 Application Number: 16/818,618 Filing Date: 2020-03-13 Inventor: Kalinin, Stanislav   Kudryavtsev, Volodymyr   Egloff thomas   Bathe, Wolfgang   Lübbers, Benedikt   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: G06T5/50 Abstract: The invention relates to a method for reducing image artifacts in images of a sample captured by scanning, wherein intensity values of at least two detection regions, denoted as pixels (Pxn), are captured along respectively one row (j) in a first scanning direction. A reconstructed image is produced on the basis of the captured intensity values. According to the invention, the intensity values of the reconstructed image are summed along the rows (j) respectively scanned by a certain pixel (Pxn) and a row sum is formed in each case. A correction value of the pixel (Pxn) is ascertained on the basis of the row sums formed thus and the correction value is applied to the intensity values, captured by means of the pixel (Pxn), of the reconstructed image, as a result of which a corrected image is obtained.
7 US10330924B2
Method for generating a control function and method for operating a scanning unit
Publication/Patent Number: US10330924B2 Publication Date: 2019-06-25 Application Number: 15/594,316 Filing Date: 2017-05-12 Inventor: Egloff thomas   Kudryavtsev, Volodymyr   Klemm, Frank   Engel, Joerg   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B26/08 Abstract: A method for generating a control signal is provided. The method includes the steps of decomposing a desired movement into two partial movements which are separately equalized, and the desired control signal is obtained by summing up the corrected components. The first movement is a slowly (mostly linear) changing long-period (period T1) movement, and the second movement is a short-period (period T2) movement, wherein the period T1 is substantially longer than the period T2. The movements have to a large extent opposing temporal derivations which are nevertheless equal in magnitude so that their sum has a time derivative that is zero. In addition, a method is provided for operating a scanning unit periodically displaceable in an infeed direction by an infeed distance.
8 DE102017207013A1
Verfahren und Vorrichtung zur Regelung von in eine Lochblende eingestrahlten Intensitäten und/oder spektralen Anteilen einer Strahlung
Publication/Patent Number: DE102017207013A1 Publication Date: 2018-10-31 Application Number: 102017207013 Filing Date: 2017-04-26 Inventor: Hilbert, Michael   Egloff thomas   Holub, Oliver   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: G02B27/40 Abstract: Die Erfindung betrifft ein Verfahren zur Regelung von in eine Lochblende (8) eingestrahlten Intensitäten (P0) und/oder spektralen Anteilen (4) einer Strahlung (3), umfassend Schritte A bis D. In dem Schritt A werden in die Lochblende (8) eingestrahlte Intensitäten (P0) und/oder spektrale Anteile (4) der Strahlung (3) in Abhängigkeit einer räumlichen Position eines Fokuspunkts (7) der Strahlung (3) und/oder eines Fokuspunkts (7B, 7G, 7Y, 7R) eines spektralen Anteils (4) relativ zur Lochblende (8) ermittelt und als Messwerte gespeichert. In Schritt B wird eine gewünschte einzustrahlende Intensität und/oder spektrale Anteile (4) der Strahlung (3) ausgewählt und in Schritt C wird anhand der ermittelten Messwerte ein Fokuspunkt (7) ausgewählt, der zur Einstrahlung der gewünschten Intensitäten und/oder spektralen Anteile (4) in die Lochblende (8) führt. Die Strahlung (3) und/oder spektrale Anteile (4) der Strahlung (3) werden mittels eines ansteuerbaren optischen Elements (6) in den ausgewählten Fokuspunkt (7) fokussiert.Die Erfindung betrifft weiterhin eine Vorrichtung (1) zur Ausführung des erfindungsgemäßen Verfahrens sowie ein Beleuchtungsmodul (12) umfassend eine erfindungsgemäße Vorrichtung (1) und ein Mikroskop (M).
9 US2017329129A1
METHOD FOR GENERATING A CONTROL FUNCTION AND METHOD FOR OPERATING A SCANNING UNIT
Publication/Patent Number: US2017329129A1 Publication Date: 2017-11-16 Application Number: 15/594,316 Filing Date: 2017-05-12 Inventor: Egloff thomas   Kudryavtsev, Volodymyr   Klemm, Frank   Engel, Joerg   Assignee: Carl Zeiss Microscopy GmbH   IPC: G02B26/10 Abstract: A method for generating a control signal is provided. The method includes the steps of decomposing a desired movement into two partial movements which are separately equalized, and the desired control signal is obtained by summing up the corrected components. The first movement is a slowly (mostly linear) changing long-period (period T1) movement, and the second movement is a short-period (period T2) movement, wherein the period T1 is substantially longer than the period T2. The movements have to a large extent opposing temporal derivations which are nevertheless equal in magnitude so that their sum has a time derivative that is zero. In addition, a method is provided for operating a scanning unit periodically displaceable in an infeed direction by an infeed distance.
10 DE102016211373A1
Verfahren zur Generierung einer Ansteuerfunktion und Verfahren zum Betrieb einer Abtasteinheit
Title (English): Method for generating a control function and method for operating an extraction device
Publication/Patent Number: DE102016211373A1 Publication Date: 2017-11-16 Application Number: 102016211373 Filing Date: 2016-06-24 Inventor: Klemm, Frank   Egloff thomas   Engel, JÖrg   Kudryavtsev, Volodymyr   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: H04N1/047 Abstract: Die Erfindung betrifft ein Verfahren zur Generierung eines Ansteuersignals (A) mit den Schritten der Zerlegung der gewünschten Bewegung (B) in zwei Teilbewegungen (B1
11 DE102015103164A1
Scanvorrichtung mit wenigstens einer eindimensional scannenden Scaneinheit
Title (English): A scanning device with at least one dimensional scanning device
Publication/Patent Number: DE102015103164A1 Publication Date: 2016-09-08 Application Number: 102015103164 Filing Date: 2015-03-04 Inventor: Egloff thomas   SchrÖter, Tobias   Assignee: CARL ZEISS MICROSCOPY GMBH   IPC: G02B21/00 Abstract: Die Erfindung betrifft eine Scanvorrichtung mit einer oder zwei gleichen Scaneinheiten zur ein- oder zweidimensionalen Ablenkung eines optischen Strahles. Die wenigstens eine Scaneinheit besteht aus einem Galvomotor (1)
12 DE102009046831B4
Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben
Title (English): A radiation generating device for generating electromagnetic radiation with adjustable spectral composition, and a method of making it.
Publication/Patent Number: DE102009046831B4 Publication Date: 2015-02-12 Application Number: 102009046831 Filing Date: 2009-11-18 Inventor: Egloff thomas   Knobbe, Jens   MÜller, Michael   GrÜger, Heinrich   Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.   IPC: B81B7/02 Abstract: Strahlungserzeugungsvorrichtung zum Erzeugen einer resultierenden elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung
13 US8351032B2
Radiation generation device for generating electromagnetic radiation having an adjustable spectral composition, and method of producing same
Publication/Patent Number: US8351032B2 Publication Date: 2013-01-08 Application Number: 12/947,612 Filing Date: 2010-11-16 Inventor: Grueger, Heinrich   Knobbe, Jens   Egloff thomas   Mueller, Michael   Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.   IPC: G01J3/28 Abstract: A radiation generation device for generating resulting electromagnetic radiation having an adjustable spectral composition includes: a multitude of radiation elements (configured to generate a radiation element specific electromagnetic radiation, respectively, upon being activated, a first radiation element of the multitude of radiation elements being activatable independently of a second radiation element of the multitude of radiation elements; a dispersive optical element; and an optical opening; the dispersive optical element being configured to deflect the radiation element specific electromagnetic radiations, in dependence on their wavelength and on a position of the radiation element generating the respective radiation element specific electromagnetic radiation, such that a particular spectral range of each of the radiation element specific electromagnetic radiations may exit through the optical opening, so that the spectral composition of the resulting electromagnetic radiation exiting through the optical opening is adjustable by selectively activating the multitude of radiation elements.
14 DE102005043627B4
Optical sensor for measuring distance and color of object
Publication/Patent Number: DE102005043627B4 Publication Date: 2012-06-14 Application Number: 102005043627 Filing Date: 2005-09-13 Inventor: Schreiber, Peter   Buss, Wolfgang   Brueckner, Andreas   Egloff thomas   Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.   IPC: G01B11/02 Abstract: The sensor has an image lens (17) for detecting light reflected by a surface (24) of an object and formed as a diffractive lens array. The light is split and is focusable via two different optical paths on receivers (31
15 JP2011123057A
RADIATION GENERATION DEVICE FOR GENERATING ELECTROMAGNETIC RADIATION HAVING AN ADJUSTABLE SPECTRAL COMPOSITION
Publication/Patent Number: JP2011123057A Publication Date: 2011-06-23 Application Number: 2010256633 Filing Date: 2010-11-17 Inventor: Mueller, Michael   Grueger, Heinrich   Knobbe, Jens   Egloff thomas   Assignee: FRAUNHOFER-GES ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV   IPC: G01J3/10 Abstract: PROBLEM TO BE SOLVED: To provide a radiation generating device and a spectral analysis device capable of changing or adjusting spectra. SOLUTION: A radiation generating device for generating resulting electromagnetic radiation having an adjustable spectral composition includes a multitude of radiation elements 1
16 US2011128541A1
Radiation Generation Device for Generating Electromagnetic Radiation Having an Adjustable Spectral Composition, and Method of Producing Same
Publication/Patent Number: US2011128541A1 Publication Date: 2011-06-02 Application Number: 12/947,612 Filing Date: 2010-11-16 Inventor: Grueger, Heinrich   Knobbe, Jens   Egloff thomas   Mueller, Michael   Assignee: Grueger, Heinrich   Knobbe, Jens   Egloff, Thomas   Mueller, Michael   IPC: G01J3/10 Abstract: A radiation generation device for generating resulting electromagnetic radiation having an adjustable spectral composition includes: a multitude of radiation elements (configured to generate a radiation element specific electromagnetic radiation, respectively, upon being activated, a first radiation element of the multitude of radiation elements being activatable independently of a second radiation element of the multitude of radiation elements; a dispersive optical element; and an optical opening; the dispersive optical element being configured to deflect the radiation element specific electromagnetic radiations, in dependence on their wavelength and on a position of the radiation element generating the respective radiation element specific electromagnetic radiation, such that a particular spectral range of each of the radiation element specific electromagnetic radiations may exit through the optical opening, so that the spectral composition of the resulting electromagnetic radiation exiting through the optical opening is adjustable by selectively activating the multitude of radiation elements.
17 US8045159B2
Optical apparatus of a stacked design, and method of producing same
Publication/Patent Number: US8045159B2 Publication Date: 2011-10-25 Application Number: 12/425,582 Filing Date: 2009-04-17 Inventor: Egloff thomas   Knobbe, Jens   Grueger, Heinrich   Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.   IPC: G01J3/28 Abstract: An optical apparatus includes a first substrate including an optical functional element, and a second substrate including a movable micromechanical functional element, the first substrate and the second substrate being connected in a stacked manner, so that a light path exists which is convoluted between the first substrate and the second substrate, the movable micromechanical functional element and the optical functional element being arranged in the light path. In addition, a method of producing an optical apparatus includes producing a first substrate including an optical functional element, and producing a second substrate including a movable micromechanical functional element, as well as connecting the first and second substrates, so that a light path exists which is convoluted between the first and second substrates, the movable micromechanical functional element and the optical functional element being arranged in the light path.
18 DE102009046831A1
Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben
Title (English): A radiation generating device for generating electromagnetic radiation with adjustable spectral composition, and a method of making it.
Publication/Patent Number: DE102009046831A1 Publication Date: 2011-05-19 Application Number: 102009046831 Filing Date: 2009-11-18 Inventor: Egloff thomas   Knobbe, Jens   MÜller, Michael   GrÜger, Heinrich   Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.   IPC: B81B7/02 Abstract: Strahlungserzeugungsvorrichtung zum Erzeugen einer resultierenden elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung
19 DE102007047010B4
Mikromechanisches Bauelement zur Modulation von elektromagnetischer Strahlung und optisches System mit demselben
Title (English): The claimant also alleges that, in the United States and Regulation No. 4,
Publication/Patent Number: DE102007047010B4 Publication Date: 2010-05-12 Application Number: 102007047010 Filing Date: 2007-10-01 Inventor: Drabe, Christian   Grueger, Heinrich   Egloff thomas   Knobbe, Jens   Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.   IPC: B81B3/00 Abstract: Ein mikromechanisches Bauelement mit einem Substrat
20 DE102008027518B3
Mirror lens e.g. observation lens for use in e.g. spatial spectrometer in field monitoring
Publication/Patent Number: DE102008027518B3 Publication Date: 2010-03-25 Application Number: 102008027518 Filing Date: 2008-06-10 Inventor: Grueger, Heinrich   Egloff thomas   Seidl, Kristof   Knobbe, Jens   Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.   IPC: G02B7/183 Abstract: The lens (100) has four mirrors (110-140)