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No. Publication Number Title Publication/Patent Number Publication/Patent Number Publication Date Publication Date
Application Number Application Number Filing Date Filing Date
Inventor Inventor Assignee Assignee IPC IPC
1
US10838307B2
Apparatus and method for operating an apparatus
Publication/Patent Number: US10838307B2 Publication Date: 2020-11-17 Application Number: 16/520,047 Filing Date: 2019-07-23 Inventor: Holz, Markus   Bihr, Ulrich   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20 Abstract: An apparatus, for example a lithography apparatus or a multi-mirror system, includes comprises a radiation source for generating radiation, a plurality of optical components for guiding the radiation in the apparatus, a plurality of actuator/sensor devices for the optical components, and a drive device for driving the actuator/sensor devices.
2
EP3320401B1
LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS
Publication/Patent Number: EP3320401B1 Publication Date: 2020-02-05 Application Number: 16736851.3 Filing Date: 2016-07-07 Inventor: Dinger, Udo   Holz, Markus   Bihr, Ulrich   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20
3
EP3423220B1
METHOD AND DEVICE FOR THE ADDITIVE MANUFACTURE OF WORKPIECES
Publication/Patent Number: EP3423220B1 Publication Date: 2020-02-26 Application Number: 18724869.5 Filing Date: 2018-05-15 Inventor: Niebling, Arno   Protzmann, Michael   Holz, Markus   Franz, Henrik   Assignee: Ald Vacuum Technologies GmbH   IPC: B22F3/105
4
US10678151B2
Control device
Publication/Patent Number: US10678151B2 Publication Date: 2020-06-09 Application Number: 16/284,143 Filing Date: 2019-02-25 Inventor: Holz, Markus   Horn, Jan   Syrowatka, Klaus   Assignee: Carl Zeiss SMT GmbH   IPC: G03B27/54 Abstract: A control device for an assembly having a plurality of sensors and/or actuators includes at least one first control unit which is designed to be vacuum-suitable, has a distributor for splitting and/or combining signals and has a converter for converting digital signals into analog signals and/or analog signals into digital signals.
5
EP3600729A1
METHOD FOR THE ADDITIVE MANUFACTURE OF WORKPIECES
Publication/Patent Number: EP3600729A1 Publication Date: 2020-02-05 Application Number: 18724867.9 Filing Date: 2018-05-15 Inventor: Niebling, Arno   Protzmann, Michael   Holz, Markus   Franz, Henrik   Assignee: Ald Vacuum Technologies GmbH   IPC: B22F3/105
6
US10843259B2
Casting method
Publication/Patent Number: US10843259B2 Publication Date: 2020-11-24 Application Number: 16/478,174 Filing Date: 2018-01-17 Inventor: Franz, Henrik   Spitans, Sergejs   Betz, Ulrich   Bauer, Egon   Holz, Markus   Assignee: ALD VACUUM TECHNOLOGIES GMBH   IPC: B22D39/00 Abstract: A method for producing cast items in a casting method, wherein a charge of a conductive material is introduced into the sphere of influence of at least one alternating electromagnetic field, so that the charge is kept in a levitating state. The melt is poured into moulds in order to produce turbine blades, prostheses or turbocharger impellers.
7
EP3586568B1
LEVITATION MELTING
Publication/Patent Number: EP3586568B1 Publication Date: 2020-12-16 Application Number: 19721225.1 Filing Date: 2019-04-18 Inventor: Spitans, Sergejs   Franz, Henrik   Sehring, Björn   Holz, Markus   Assignee: ALD Vacuum Technologies GmbH   IPC: H05B6/32
8
EP3570993B1
CASTING METHOD
Publication/Patent Number: EP3570993B1 Publication Date: 2020-09-23 Application Number: 18701010.3 Filing Date: 2018-01-17 Inventor: Franz, Henrik   Spitans, Sergejs   Betz, Ulrich   Bauer, Egon   Holz, Markus   Assignee: Ald Vacuum Technologies GmbH   IPC: H05B6/32
9
EP3570993B8
CASTING METHOD
Publication/Patent Number: EP3570993B8 Publication Date: 2020-11-18 Application Number: 18701010.3 Filing Date: 2018-01-17 Inventor: Franz, Henrik   Spitans, Sergejs   Betz, Ulrich   Bauer, Egon   Holz, Markus   Assignee: ALD Vacuum Technologies GmbH   IPC: H05B6/32
10
EP3586568A1
LEVITATION MELTING PROCESS
Title (English): 1
Publication/Patent Number: EP3586568A1 Publication Date: 2020-01-01 Application Number: 19721225.1 Filing Date: 2019-04-18 Inventor: Spitans, Sergejs   Franz, Henrik   Sehring, Björn   Holz, Markus   Assignee: Ald Vacuum Technologies GmbH   IPC: H05B6/32
11
EP3622782B1
DEVICE AND METHOD FOR LEVITATION MELTING USING INDUCTION UNITS WHICH ARE ARRANGED IN A TILTED MANNER
Publication/Patent Number: EP3622782B1 Publication Date: 2020-09-16 Application Number: 19739555.1 Filing Date: 2019-07-09 Inventor: Spitans, Sergejs   Franz, Henrik   Sehring, Björn   Holz, Markus   Krieger, Andreas   Assignee: ALD Vacuum Technologies GmbH   IPC: H05B6/32
12
EP3622782A1
DEVICE AND METHOD FOR LEVITATION MELTING USING INDUCTION UNITS WHICH ARE ARRANGED IN A TILTED MANNER
Publication/Patent Number: EP3622782A1 Publication Date: 2020-03-18 Application Number: 19739555.1 Filing Date: 2019-07-09 Inventor: Spitans, Sergejs   Franz, Henrik   Sehring, Björn   Holz, Markus   Krieger, Andreas   Assignee: Ald Vacuum Technologies GmbH   IPC: H05B6/32
13
WO2020016063A1
DEVICE AND METHOD FOR LEVITATION MELTING USING INDUCTION UNITS WHICH ARE ARRANGED IN A TILTED MANNER
Publication/Patent Number: WO2020016063A1 Publication Date: 2020-01-23 Application Number: 2019068432 Filing Date: 2019-07-09 Inventor: Franz, Henrik   Holz, Markus   Krieger, Andreas   Spitans, Sergejs   Sehring, Björn   Assignee: Ald Vacuum Technologies GmbH   IPC: H05B6/44 Abstract: The invention relates to a levitation melting method and to a device for producing cast bodies using induction units which are arranged in a tilted manner. In the method, induction units are used in which the respective opposing ferrite poles are not designed to lie on one plane with the induction coils but rather are tilted at a specified angle relative to the levitation plane. Thus, the efficiency of the induced magnetic field for melting the batches can be increased with the induction units. By virtue of the tilted assembly, the component of the induced magnetic field which effectively accounts for the holding force of the field for levitating the molten metal is increased.
14
DE102018117304A1
Vorrichtung und Verfahren zum Schwebeschmelzen mit gekippt angeordneten Induktionseinheiten
Publication/Patent Number: DE102018117304A1 Publication Date: 2020-01-23 Application Number: 102018117304 Filing Date: 2018-07-17 Inventor: Franz, Henrik   Holz, Markus   Krieger, Andreas   Spitans, Sergejs   Sehring, Björn   Assignee: Ald Vacuum Technologies GmbH   IPC: H05B6/32 Abstract: Die Erfindung betrifft ein Schwebeschmelzverfahren und eine Vorrichtung zur Herstellung von Gusskörpern mit gekippt angeordneten Induktionseinheiten. Bei dem Verfahren werden Induktionseinheiten eingesetzt, bei denen die jeweils gegenüberliegenden Ferritpole mit den Induktionsspulen nicht in einer Ebene liegend ausgestaltet sind, sondern in einem bestimmten Winkel gekippt zur Levitationsebene. So kann bei den Induktionseinheiten eine Effizienzsteigerung des induzierten Magnetfelds zum Aufschmelzen der Chargen erzielt werden. Durch die gekippte Anordnung wird der Anteil des induzierten Magnetfelds, der effektiv zur Haltekraft des Felds für die Levitation der Schmelze beiträgt, vergrößert.
15
US2020110340A1
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION EXPOSURE SYSTEM, AND ILLUMINATION SYSTEM
Publication/Patent Number: US2020110340A1 Publication Date: 2020-04-09 Application Number: 16/704,677 Filing Date: 2019-12-05 Inventor: Baier, Juergen   Runde, Daniel   Manger, Matthias   Mueller, Ulrich   Lichtenthaeler, Joerg   Orthen, André   Welker, Joachim   Holz, Markus   Holderer, Hubert   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20 Abstract: The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus
16
US2019346772A1
APPARATUS AND METHOD FOR OPERATING AN APPARATUS
Publication/Patent Number: US2019346772A1 Publication Date: 2019-11-14 Application Number: 16/520,047 Filing Date: 2019-07-23 Inventor: Holz, Markus   Bihr, Ulrich   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20 Abstract: An apparatus, for example a lithography apparatus or a multi-mirror system, includes comprises a radiation source for generating radiation, a plurality of optical components for guiding the radiation in the apparatus, a plurality of actuator/sensor devices for the optical components, and a drive device for driving the actuator/sensor devices.
17
DE102018219782A1
Verfahren zur Bestimmung einer Temperatur an einem Punkt einer Komponente einer EUV-Projektionsbelichtungsanlage
Publication/Patent Number: DE102018219782A1 Publication Date: 2019-01-10 Application Number: 102018219782 Filing Date: 2018-11-19 Inventor: Holz, Markus   Ameling, Ralf   Assignee: CARL ZEISS SMT GMBH   IPC: G02B7/198 Abstract: Die Erfindung betrifft ein Verfahren zur Bestimmung einer Temperatur an einem Punkt einer Komponente (2) einer Projektionsbelichtungsanlage (1) für die Halbleiterlithographie, wobei die Temperatur anhand einer Positionsänderung mindestens eines Teiles (31) der Komponente (2) ermittelt wird.
18
US10261424B2
Lithography apparatus and method for operating a lithography apparatus
Publication/Patent Number: US10261424B2 Publication Date: 2019-04-16 Application Number: 15/845,590 Filing Date: 2017-12-18 Inventor: Dinger, Udo   Holz, Markus   Bihr, Ulrich   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20 Abstract: A lithography apparatus includes a radiation source configured to produce radiation having a repetition frequency. The lithography apparatus also includes an optical component configured to guide the radiation within the lithography apparatus. The lithography apparatus further includes an actuator device configured to displace the optical component. In addition, the lithography apparatus includes a measurement device configured to determine a position of the optical component via a measurement signal having a measurement signal frequency. The measurement signal frequency is unequal to the repetition frequency, and the measurement signal frequency is unequal to integer multiples of the repetition frequency.
19
EP3504592A1
CONTROL DEVICE
Publication/Patent Number: EP3504592A1 Publication Date: 2019-07-03 Application Number: 17757742.6 Filing Date: 2017-08-22 Inventor: Holz, Markus   Horn, Jan   Syrowatka, Klaus   Assignee: Carl Zeiss SMT GmbH   IPC: G03F7/20
20
US10514619B2
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
Publication/Patent Number: US10514619B2 Publication Date: 2019-12-24 Application Number: 15/878,041 Filing Date: 2018-01-23 Inventor: Bihr, Ulrich   Holz, Markus   Horn, Jan   Assignee: Carl Zeiss SMT GmbH   IPC: G03B27/42 Abstract: The disclosure provides a sensor arrangement for sensing a position of an optical element in a lithography system. The sensor arrangement includes: a first capacitive sensor device having a position-dependent variable first sensor capacitance that can be sensed using a first excitation signal; a second capacitive sensor device having a position-dependent variable second sensor capacitance that can be sensed using a second excitation signal; and a control device configured to produce the first and second excitation signals so that charges present on a parasitic capacitance associable with the first sensor device are at least partially compensated for by charges that are present on a parasitic capacitance associable with the second sensor device via a signal path outside the first and/or the second excitation signal path.