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1
EP3608944A1
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: EP3608944A1 Publication Date: 2020-02-12 Application Number: 19188206.7 Filing Date: 2016-05-23 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L21/20 Abstract: A method for removing nuclei formed during a selective epitaxial growth process includes epitaxially growing a first group of one or more semiconductor structures over a substrate with one or more mask layers. A second group of a plurality of semiconductor structures is formed on the one or more mask layers. The method also includes forming one or more protective layers over the first group of one or more semiconductor structures. At least a subset of the second group of the plurality of semiconductor structures is exposed from the one or more protective layers. The method further includes, subsequent to forming the one or more protective layers over the first group of one or more semiconductor structures, etching at least the subset of the second group of the plurality of semiconductor structures.
2
EP3528288B1
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS IMAGE SENSORS
Publication/Patent Number: EP3528288B1 Publication Date: 2020-08-26 Application Number: 18214935.1 Filing Date: 2014-06-20 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/146
3
US10600640B2
Reduction of surface roughness in epitaxially grown germanium by controlled thermal oxidation
Publication/Patent Number: US10600640B2 Publication Date: 2020-03-24 Application Number: 15/624,603 Filing Date: 2017-06-15 Inventor: Jung woo shik   Na, Yeul   Kim, Youngsik   Lee, Jae Hyung   Lee, Jin Hyung   Assignee: Stratio, Inc.   IPC: H01L21/02 Abstract: Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.
4
EP3528288A1
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS IMAGE SENSORS
Publication/Patent Number: EP3528288A1 Publication Date: 2019-08-21 Application Number: 18214935.1 Filing Date: 2014-06-20 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/146 Abstract: A device for sensing light includes a first semiconductor region doped with a dopant of a first type and a second semiconductor region doped with a dopant of a second type. The second semiconductor region is positioned above the first semiconductor region. The device includes a gate insulation layer; a gate, a source, and a drain. The second semiconductor region has a top surface that is positioned toward the gate insulation layer and a bottom surface that is positioned opposite to the top surface of the second semiconductor region. The second semiconductor region has an upper portion that includes the top surface of the second semiconductor region and a lower portion that includes the bottom surface of the second semiconductor region and is mutually exclusive with the upper portion. The first semiconductor region is in contact with both the upper portion and the lower portion of the second semiconductor region.
5
US2019221595A1
Gate-controlled Charge Modulated Device for CMOS Image Sensors
Publication/Patent Number: US2019221595A1 Publication Date: 2019-07-18 Application Number: 16/167,241 Filing Date: 2018-10-22 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio Inc.   IPC: H01L27/146 Abstract: A device for sensing light includes a first semiconductor region doped with a dopant of a first type and a second semiconductor region doped with a dopant of a second type. The second semiconductor region is positioned above the first semiconductor region. The device includes a gate insulation layer; a gate, a source, and a drain. The second semiconductor region has a top surface that is positioned toward the gate insulation layer and a bottom surface that is positioned opposite to the top surface of the second semiconductor region. The second semiconductor region has an upper portion that includes the top surface of the second semiconductor region and a lower portion that includes the bottom surface of the second semiconductor region and is mutually exclusive with the upper portion. The first semiconductor region is in contact with both the upper portion and the lower portion of the second semiconductor region.
6
KR20180029091A
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: KR20180029091A Publication Date: 2018-03-19 Application Number: 20187006394 Filing Date: 2016-05-23 Inventor: Lee, Jae Hyung   Kim, Youngsik   Na, Yeul   Jung woo shik   Assignee: STRATIO, INC.   STRATIO   IPC: H01L21/02 Abstract: 선택적 에피택셜 성장 공정 동안 형성되는 핵을 제거하는 방법은, 하나 이상의 마스크 층을 갖는 기판 위에 하나 이상의 반도체 구조의 제1 그룹을 에피택셜 성장시키는 단계를 포함한다. 복수의 반도체 구조의 제2 그룹은 하나 이상의 마스크 층 상에 형성된다. 방법은, 또한, 하나 이상의 반도체 구조의 제1 그룹 위에 하나 이상의 보호층을 형성하는 단계를 포함한다. 복수의 반도체 구조의 제2 그룹의 적어도 서브세트는 하나 이상의 보호층으로부터 노출된다. 방법은, 하나 이상의 반도체 구조의 제1 그룹 위에 하나 이상의 보호층을 형성하는 단계에 후속하여, 복수의 반도체 구조의 제2 그룹의 적어도 그 서브세트를 에칭하는 단계를 더 포함한다.
7
JP2018129536A
GATE CONTROL TYPE CHARGING MODULATION DEVICE FOR CMOS IMAGE SENSOR
Publication/Patent Number: JP2018129536A Publication Date: 2018-08-16 Application Number: 2018078326 Filing Date: 2018-04-16 Inventor: Lee, Jae-hyung   Kim, Youngsik   Jung woo shik   Na, Yeul   Assignee: STRATIO INC   IPC: H01L31/10 Abstract: PROBLEM TO BE SOLVED: To provide an optical sensor having a small dark current, a high quantum efficiency, and an enhancement channel modulation.SOLUTION: A device 100 for detecting a light, includes: a first semiconductor region 104 doped by using a first type dopant; and a second semiconductor region 106 doped by using a second type dopant. The second semiconductor region is arranged on an upper direction of the first semiconductor region. The device includes: a gate insulation layer 110; a gate 112; a source 114; and a drain 116. The second semiconductor region includes an upper surface arranged so as to be directed to the gate insulation layer, and a bottom surface arranged on the side opposite to the upper surface of the second semiconductor region. The second semiconductor region includes: an upper part including the upper surface of the second semiconductor region; and a lower part including the bottom surface of the second semiconductor region which is alternately excluded from an upper side part. The first semiconductor region is contacted with both sides of an upper side part and a lower side part of the second semiconductor region.SELECTED DRAWING: Figure 1A
8
US10109662B2
Gate-controlled charge modulated device for CMOS image sensors
Publication/Patent Number: US10109662B2 Publication Date: 2018-10-23 Application Number: 14/967,262 Filing Date: 2015-12-11 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/146 Abstract: A device for sensing light includes a first semiconductor region doped with a dopant of a first type and a second semiconductor region doped with a dopant of a second type. The second semiconductor region is positioned above the first semiconductor region. The device includes a gate insulation layer; a gate, a source, and a drain. The second semiconductor region has a top surface that is positioned toward the gate insulation layer and a bottom surface that is positioned opposite to the top surface of the second semiconductor region. The second semiconductor region has an upper portion that includes the top surface of the second semiconductor region and a lower portion that includes the bottom surface of the second semiconductor region and is mutually exclusive with the upper portion. The first semiconductor region is in contact with both the upper portion and the lower portion of the second semiconductor region.
9
EP3011594B1
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS IMAGE SENSORS
Publication/Patent Number: EP3011594B1 Publication Date: 2018-12-26 Application Number: 14814462.9 Filing Date: 2014-06-20 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/146
10
KR20170029638A
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: KR20170029638A Publication Date: 2017-03-15 Application Number: 20177005543 Filing Date: 2016-05-23 Inventor: Lee, Jae Hyung   Kim, Youngsik   Na, Yeul   Jung woo shik   Assignee: STRATIO, INC.   STRATIO   IPC: H01L21/02 Abstract: 선택적 에피택셜 성장 공정 동안 형성되는 핵을 제거하는 방법은
11
KR20170096134A
REDUCTION OF SURFACE ROUGHNESS IN EPITAXIALLY GROWN GERMANIUM BY CONTROLLED THERMAL OXIDATION
Publication/Patent Number: KR20170096134A Publication Date: 2017-08-23 Application Number: 20177018942 Filing Date: 2015-12-15 Inventor: Lee, Jae Hyung   Kim, Youngsik   Lee, Jin Hyung   Na, Yeul   Jung woo shik   Assignee: STRATIO, INC.   IPC: H01L21/02 Abstract: 본원에서는 게르마늄의 표면 거칠기를 감소시키기 위한 방법들이 개시되어 있다. 몇몇 실시형태에서
12
EP3011594A4
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS IMAGE SENSORS
Publication/Patent Number: EP3011594A4 Publication Date: 2017-03-01 Application Number: 14814462 Filing Date: 2014-06-20 Inventor: Kim, Youngsik   Lee, Jae Hyung   Na, Yeul   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/146
13
EP3111466A4
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: EP3111466A4 Publication Date: 2017-03-29 Application Number: 16750355 Filing Date: 2016-05-23 Inventor: Na, Yeul   Jung woo shik   Kim, Youngsik   Lee, Jae Hyung   Assignee: Stratio, Inc.   IPC: H01L21/20
14
EP3111466A1
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: EP3111466A1 Publication Date: 2017-01-04 Application Number: 16750355.6 Filing Date: 2016-05-23 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   STRATIO   IPC: H01L21/02
15
US2017287706A1
Reduction of Surface Roughness in Epitaxially Grown Germanium by Controlled Thermal Oxidation
Publication/Patent Number: US2017287706A1 Publication Date: 2017-10-05 Application Number: 15/624,603 Filing Date: 2017-06-15 Inventor: Jung woo shik   Na, Yeul   Kim, Youngsik   Lee, Jae Hyung   Lee, Jin Hyung   Assignee: Stratio, Inc.   IPC: H01L21/02 Abstract: Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.
16
KR20160094416A
LAYER TRANSFER TECHNOLOGY FOR SILICON CARBIDE
Publication/Patent Number: KR20160094416A Publication Date: 2016-08-09 Application Number: 20167017717 Filing Date: 2014-12-02 Inventor: Lee, Jae Hyung   Jung woo shik   Assignee: STRATIO, INC.   STRATIO   IPC: H01L21/02 Abstract: 탄화규소 층을 포함하는 소자 및 그러한 소자를 만들기 위한 방법이 개시된다. 방법은 양성자가 주입된 제1 탄화규소 웨이퍼를 획득하는 단계; 제1 탄화규소 웨이퍼 위에 스핀-온-글라스의 제1 층을 도포하는 단계; 제1 반도체 기판을 획득하는 단계; (ⅰ) 스핀-온-글라스의 제1 층을 (ⅱ) 제1 반도체 기판에 접합하는 단계; 및 탄화규소의 제1 층이 제1 반도체 기판 위에 남아 있도록 제1 탄화규소 웨이퍼의 스플리팅을 개시하기 위해서 제1 탄화규소 웨이퍼를 가열하는 단계를 포함한다. 반도체 소자는 반도체 기판; 반도체 기판 위에 위치되는 스핀-온-글라스의 제1 층; 스핀-온-글라스의 제1 층 위에 위치되는 탄화규소의 제1 층; 탄화규소의 제1 층 위에 위치되는 스핀-온-글라스의 제2 층; 및 스핀-온-글라스의 제2 층 위에 위치되는 탄화규소의 제2 층을 포함한다.
17
KR20160021289A
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS SENSORS
Publication/Patent Number: KR20160021289A Publication Date: 2016-02-24 Application Number: 20167001437 Filing Date: 2014-06-20 Inventor: Lee, Jae Hyung   Kim, Youngsik   Na, Yeul   Jung woo shik   Assignee: STRATIO, INC.   IPC: H01L27/146 Abstract: 광을 감지하는 디바이스는 제 1 타입의 도펀트로 도핑된 제 1 반도체 영역 및 제 2 타입의 도펀트로 도핑된 제 2 반도체 영역을 포함한다. 제 2 반도체 영역은 제 1 반도체 영역 위에 배치된다. 디바이스는 게이트 절연 층; 게이트
18
US9378950B1
Methods for removing nuclei formed during epitaxial growth
Publication/Patent Number: US9378950B1 Publication Date: 2016-06-28 Application Number: 15/051,362 Filing Date: 2016-02-23 Inventor: Lee, Jae Hyung   Kim, Youngsik   Na, Yeul   Jung woo shik   Assignee: STRATIO   STRATIO INC.   IPC: H01L21/336 Abstract: A method for removing nuclei formed during a selective epitaxial growth process includes epitaxially growing a first group of one or more semiconductor structures over a substrate with one or more mask layers. A second group of a plurality of semiconductor structures is formed on the one or more mask layers. The method also includes forming one or more protective layers over the first group of one or more semiconductor structures. At least a subset of the second group of the plurality of semiconductor structures is exposed from the one or more protective layers. The method further includes, subsequent to forming the one or more protective layers over the first group of one or more semiconductor structures, etching at least the subset of the second group of the plurality of semiconductor structures.
19
WO2016191371A1
METHODS FOR REMOVING NUCLEI FORMED DURING EPITAXIAL GROWTH
Publication/Patent Number: WO2016191371A1 Publication Date: 2016-12-01 Application Number: 2016033783 Filing Date: 2016-05-23 Inventor: Jung woo shik   Kim, Youngsik   Lee, Jae Hyung   Na, Yeul   Assignee: STRATIO   STRATIO, INC.   IPC: H01L21/02 Abstract: A method for removing nuclei formed during a selective epitaxial growth process includes epitaxially growing a first group of one or more semiconductor structures over a substrate with one or more mask layers. A second group of a plurality of semiconductor structures is formed on the one or more mask layers. The method also includes forming one or more protective layers over the first group of one or more semiconductor structures. At least a subset of the second group of the plurality of semiconductor structures is exposed from the one or more protective layers. The method further includes
20
EP3011594A2
GATE-CONTROLLED CHARGE MODULATED DEVICE FOR CMOS IMAGE SENSORS
Publication/Patent Number: EP3011594A2 Publication Date: 2016-04-27 Application Number: 14814462.9 Filing Date: 2014-06-20 Inventor: Lee, Jae Hyung   Na, Yeul   Kim, Youngsik   Jung woo shik   Assignee: Stratio, Inc.   IPC: H01L27/14