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No. Publication Number Title Publication/Patent Number Publication/Patent Number Publication Date Publication Date
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1 US10725287B2
Image rotation compensation for multiple beam material processing
Publication/Patent Number: US10725287B2 Publication Date: 2020-07-28 Application Number: 13/915,509 Filing Date: 2013-06-11 Inventor: Karlsen scott r   Assignee: nLIGHT, Inc.   IPC: G02B26/10 Abstract: An image compensated multi-beam system includes a beam splitter configured to receive an input light beam and split the input light beam into a plurality of processing light beams, beam scanning optics configured to receive the plurality of processing light beams and to scan the beams at a target, and an image compensation subsystem configured to selectively adjust the rotation of an image of the plurality of processing light beams at the target. A method for compensating a multi-beam image includes splitting an input light beam into a plurality of processing light beams with a beam splitter, scanning the plurality of processing light beams across a target with beam scanning optics, and selectively adjusting the rotation of an image of the plurality of processing light beams at the target.
2 US2020043736A1
SHORT PULSE FIBER LASER FOR LTPS CRYSTALLIZATION
Publication/Patent Number: US2020043736A1 Publication Date: 2020-02-06 Application Number: 16/598,210 Filing Date: 2019-10-10 Inventor: Martinsen, Robert J.   Karlsen scott r   Gross, Ken   Assignee: nLIGHT, Inc.   IPC: H01L21/268 Abstract: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.
3 US2020147719A1
SCANNER DRIFT COMPENSATION FOR LASER MATERIAL PROCESSING
Publication/Patent Number: US2020147719A1 Publication Date: 2020-05-14 Application Number: 16/745,242 Filing Date: 2020-01-16 Inventor: Karlsen scott r   Martinsen, Robert J.   Assignee: nLIGHT, Inc.   IPC: B23K26/03 Abstract: A scanned optical beam is divided so as to form a set of scanned subbeams. To compensate for scan errors, a portion of at least one subbeam is detected and a scan error estimated based on the detected portion. A beam scanner is controlled according to the estimated error so as to adjust a propagation direction of some or all of the set of scanned subbeams. The scanned subbeams with adjusted propagation directions are received by an f-theta lens and directed to a work piece. In typical examples, the portion of the at least one subbeam that is detected is obtained from the set of scanned subbeams prior to incidence of the scanned subbeams to the f-theta lens.
4 US202043736A1
SHORT PULSE FIBER LASER FOR LTPS CRYSTALLIZATION
Publication/Patent Number: US202043736A1 Publication Date: 2020-02-06 Application Number: 20/191,659 Filing Date: 2019-10-10 Inventor: Karlsen scott r   Martinsen, Robert J.   Gross, Ken   Assignee: nLIGHT, Inc.   IPC: B23K26/0622 Abstract: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.
5 US10569357B1
Scanner drift compensation for laser material processing
Publication/Patent Number: US10569357B1 Publication Date: 2020-02-25 Application Number: 14/450,162 Filing Date: 2014-08-01 Inventor: Karlsen scott r   Martinsen, Robert J.   Assignee: nLIGHT, Inc.   IPC: B23K26/03 Abstract: A scanned optical beam is divided so as to form a set of scanned subbeams. To compensate for scan errors, a portion of at least one subbeam is detected and a scan error estimated based on the detected portion. A beam scanner is controlled according to the estimated error so as to adjust a propagation direction of some or all of the set of scanned subbeams. The scanned subbeams with adjusted propagation directions are received by an f-theta lens and directed to a work piece. In typical examples, the portion of the at least one subbeam that is detected is obtained from the set of scanned subbeams prior to incidence of the scanned subbeams to the f-theta lens.
6 US10670872B2
All-fiber optical beam switch
Publication/Patent Number: US10670872B2 Publication Date: 2020-06-02 Application Number: 15/934,959 Filing Date: 2018-03-24 Inventor: Karlsen scott r   Victor, Brian M.   Farrow, Roger L.   Assignee: nLIGHT, Inc.   IPC: G02B6/27 Abstract: An all-fiber optical beam switch mechanism includes a first length of fiber through which an incident optical beam having beam characteristics propagates along a first propagation path and which has a first refractive index profile (RIP). The first RIP enables, in response to an applied perturbation, modification of the optical beam to form an adjusted optical beam that is movable to propagate along a second propagation path. A second length of fiber is coupled to the first length of fiber and formed with multiple spaced-apart, non-coaxial confinement cores. A selected state of applied perturbation moves the second propagation path of the adjusted optical beam to a position of a selected corresponding one of the multiple confinement cores to confine and thereby direct the adjusted optical beam to a corresponding beam output location at the output of the second length of fiber.
7 EP3631544A1
ALL-FIBER OPTICAL BEAM SWITCH
Publication/Patent Number: EP3631544A1 Publication Date: 2020-04-08 Application Number: 18805019.9 Filing Date: 2018-03-25 Inventor: Karlsen scott r   Victor, Brian M.   Farrow, Roger L.   Assignee: Nlight, Inc.   IPC: G02B6/35
8 US10406630B1
Multi-beam laser processing with dispersion compensation
Publication/Patent Number: US10406630B1 Publication Date: 2019-09-10 Application Number: 14/939,836 Filing Date: 2015-11-12 Inventor: Karlsen scott r   Assignee: nLIGHT, Inc.   IPC: B23K26/00 Abstract: A multi-beam laser material processing system for processing a target includes a beam splitting system situated to receive an input beam, the beam splitting system including a beam splitter situated to receive and split the input beam into a plurality of subbeams, a focus lens situated to receive the subbeams and cause the subbeams to converge, a zoom lens system situated to receive the subbeams and adjust the magnification of the subbeams at the target, and a dispersion compensation system situated to receive the subbeams and compensate for dispersion associated with the subbeams, the dispersion compensation system including a negative diffractive lens and a positive diffractive lens.
9 US10453691B2
Short pulse fiber laser for LTPS crystallization
Publication/Patent Number: US10453691B2 Publication Date: 2019-10-22 Application Number: 14/144,350 Filing Date: 2013-12-30 Inventor: Martinsen, Robert J.   Karlsen scott r   Gross, Ken   Assignee: nLIGHT, Inc.   IPC: H01L21/268 Abstract: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.
10 US10374378B2
Light trap for high power fiber laser connector
Publication/Patent Number: US10374378B2 Publication Date: 2019-08-06 Application Number: 16/158,135 Filing Date: 2018-10-11 Inventor: Karlsen scott r   Sanders, Walter R.   Assignee: NLIGHT, INC.   IPC: H01S3/067 Abstract: A fiber laser system includes a fiber laser connector having a housing to terminate a fiber that generates a laser beam. A chamber extends internally along a length of the housing. A light trap includes a plurality of threads formed along a wall of the chamber to trap light reflected back to the fiber laser connector in response to an application of the laser beam to a workpiece.
11 US2019123505A1
LIGHT TRAP FOR HIGH POWER FIBER LASER CONNECTOR
Publication/Patent Number: US2019123505A1 Publication Date: 2019-04-25 Application Number: 16/158,135 Filing Date: 2018-10-11 Inventor: Karlsen scott r   Sanders, Walter R.   Assignee: NLIGHT, Inc.   IPC: H01S3/067 Abstract: A fiber laser system includes a fiber laser connector having a housing to terminate a fiber that generates a laser beam. A chamber extends internally along a length of the housing. A light trap includes a plurality of threads formed along a wall of the chamber to trap light reflected back to the fiber laser connector in response to an application of the laser beam to a workpiece.
12 US10226837B2
Thermal processing with line beams
Publication/Patent Number: US10226837B2 Publication Date: 2019-03-12 Application Number: 13/837,647 Filing Date: 2013-03-15 Inventor: Karlsen scott r   Kennedy, Keith   Martinsen, Robert J.   Assignee: nLIGHT, Inc.   IPC: B23K26/00 Abstract: Multi-beam, multi-wavelength processing systems include two or more lasers configured to provide respective beams to a substrate. The beams have wavelengths, pulse durations, beam areas, beam intensities, pulse energies, polarizations, repetition rates, and other beam properties that are independently selectable. Substrate distortion in processes requiring local heating can be reduced by preheating with a large area beam at a first wavelength followed by exposure to a focused beam at a second wavelength so as to heat a local area to a desired process temperature. For some processing, multiple wavelengths are selected to obtain a desired energy deposition within a substrate.
13 EP3453085A1
LIGHT TRAP FOR HIGH POWER FIBER LASER CONNECTOR
Publication/Patent Number: EP3453085A1 Publication Date: 2019-03-13 Application Number: 17800026.1 Filing Date: 2017-05-16 Inventor: Karlsen scott r   Sanders, Walter R.   Assignee: NLIGHT, Inc.   IPC: H01S3/067
14 US2019146200A1
HIGH POWER LASER SYSTEM
Publication/Patent Number: US2019146200A1 Publication Date: 2019-05-16 Application Number: 16/149,712 Filing Date: 2018-10-02 Inventor: Karlsen scott r   Martinsen, Robert J.   Kennedy, Keith W.   Assignee: nLIGHT, Inc.   IPC: G02B19/00 Abstract: A laser system capable of producing a stable and accurate high-power output beam from one or more input beams of corresponding laser sources comprises one or more optical elements configured to receive the input beams wherein at least one of said one or more optical elements is made of high purity fused silica.
15 US10466494B2
Reverse interleaving for laser line generators
Publication/Patent Number: US10466494B2 Publication Date: 2019-11-05 Application Number: 15/384,059 Filing Date: 2016-12-19 Inventor: Lerner, Scott A.   Price, R. Kirk   Karlsen scott r   Assignee: nLIGHT, Inc.   IPC: G02B27/09 Abstract: An apparatus includes beam shearing optics situated to receive a collimated beam and to shear the collimated beam along a first direction so as to form a plurality of adjacent collimated beam portions, and homogenization optics situated to receive and homogenize the adjacent collimated beam portions along at least the first direction so as to produce a homogenized output beam. A method includes shearing a collimated beam having a beam parameter product (bpp) along an axis so as to form a plurality of sheared collimated beam portions, and arranging the sheared collimated beam portions adjacent to each other so that a line beam having a length and thickness that is formed with the light from the sheared collimated beam portions has a lower bpp associated with the line beam thickness than the bpp of the collimated beam along the axis.
16 KR20190017000A
IMPROVED THERMAL PROCESSING WITH LINE BEAMS
Publication/Patent Number: KR20190017000A Publication Date: 2019-02-19 Application Number: 20190015338 Filing Date: 2019-02-11 Inventor: Karlsen scott r   Kennedy, Keith W.   Martinsen, Robert. J.   Assignee: NLIGHT, INC.   IPC: G03F7/20 Abstract: A multi-beam and multi-wavelength processing system comprises at least two lasers formed to provide each beam for a substrate. The beams comprise wavelengths, pulse duration times, beam areas, beam strength, pulse energies, polarized light, a repetition rate, and independently selectable other beam properties. In a process requiring local heating, deformation of a substrate can be reduced as the substrate is heated in advance by using a beam of a large area in a first wavelength, and exposed to a focused beam in a second wavelength for heating a local area at a desired processing temperature. For other processing steps, multi-wavelengths are selected to acquire desired energy deposition inside the substrate.
17 US10295405B2
Active monitoring of multi-laser systems
Publication/Patent Number: US10295405B2 Publication Date: 2019-05-21 Application Number: 15/079,664 Filing Date: 2016-03-24 Inventor: Karlsen scott r   Small, Jay   Stanek, Mitch   Errico, Vito P.   Kiest, Cary S.   Assignee: nLIGHT, Inc.   IPC: G01J1/42 Abstract: A monitoring system for a multi-laser module includes detectors corresponding to each laser and situated to receive a portion of the associated laser beam uncombined with other beams. Laser characteristics are measured and stored, and in operation are used to identify device failures. A comparator receives a reference value and compares the reference value with a current operational value. If the current value is less that the reference value, a possible failure is indicated. Signal cross-coupling among the detectors is also used to identify undesirable scattering that can be associated with surface contamination or device failure.
18 US201875939A1
OPTIMIZATION OF HIGH RESOLUTION DIGITALLY ENCODED LASER SCANNERS FOR FINE FEATURE MARKING
Publication/Patent Number: US201875939A1 Publication Date: 2018-03-15 Application Number: 20/171,580 Filing Date: 2017-11-06 Inventor: Karlsen scott r   Assignee: Gross, Ken   nLIGHT, Inc.   IPC: G21K5/04 Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.
19 US10141707B2
Light trap for high power fiber laser connector
Publication/Patent Number: US10141707B2 Publication Date: 2018-11-27 Application Number: 15/596,924 Filing Date: 2017-05-16 Inventor: Karlsen scott r   Sanders, Walter R.   Assignee: NLIGHT, Inc.   IPC: G02B6/00 Abstract: A fiber laser system includes a fiber laser connector having a housing to terminate a fiber that generates a laser beam. A chamber extends internally along a length of the housing. A light trap includes a plurality of threads formed along a wall of the chamber to trap light reflected back to the fiber laser connector in response to an application of the laser beam to a workpiece.
20 US2018217386A1
ALL-FIBER OPTICAL BEAM SWITCH
Publication/Patent Number: US2018217386A1 Publication Date: 2018-08-02 Application Number: 15/934,959 Filing Date: 2018-03-24 Inventor: Farrow, Roger L.   Victor, Brian M.   Karlsen scott r   Assignee: nLIGHT, Inc.   IPC: G02B6/35 Abstract: An all-fiber optical beam switch mechanism includes a first length of fiber through which an incident optical beam having beam characteristics propagates along a first propagation path and which has a first refractive index profile (RIP). The first RIP enables, in response to an applied perturbation, modification of the optical beam to form an adjusted optical beam that is movable to propagate along a second propagation path. A second length of fiber is coupled to the first length of fiber and formed with multiple spaced-apart, non-coaxial confinement cores. A selected state of applied perturbation moves the second propagation path of the adjusted optical beam to a position of a selected corresponding one of the multiple confinement cores to confine and thereby direct the adjusted optical beam to a corresponding beam output location at the output of the second length of fiber.