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1 | US10943936B2 |
Method of producing an optical sensor at wafer-level and optical sensor
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Publication/Patent Number: US10943936B2 | Publication Date: 2021-03-09 | Application Number: 16/316,724 | Filing Date: 2017-08-08 | Inventor： Toschkoff, Gregor Bodner, Thomas Schrank, Franz | Assignee: AMS AG | IPC: H01L27/146 | Abstract: A method is proposed to produce an optical sensor at wafer-level, the methods comprises the following steps. A wafer is provided and has a main top surface and a main back surface. At or near the top surface of the wafer at least one integrated circuit is arranged having a light sensitive component. A first mold tool is placed over the at least one integrated circuit such that at least one channel remains between the first mold tool and the top surface to enter a first mold material. A first mold structure is formed by wafer-level molding the first mold material via the at least one channel. The first mold material creates at least one runner structure. A second mold tool is placed over the first mold structure and a second mold structure is formed by wafer-level molding a second mold material by means of the second mold tool. A light path blocking structure is arranged on the top surface to block light from entering via the at least one runner structure. | |||
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2 | EP2889901B1 |
Semiconductor device with through-substrate via and corresponding method
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Publication/Patent Number: EP2889901B1 | Publication Date: 2021-02-03 | Application Number: 13199683.7 | Filing Date: 2013-12-27 | Inventor： Schrank, Franz Carniello, Sara Enichlmair, Hubert Kraft, Jochen Löffler, Bernhard Holzhaider, Rainer | Assignee: ams AG | IPC: H01L21/768 | ||||
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3 | EP3301425B1 |
PRESSURE SENSOR DEVICE AND METHOD FOR FORMING A PRESSURE SENSOR DEVICE
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Publication/Patent Number: EP3301425B1 | Publication Date: 2021-01-20 | Application Number: 16196616.3 | Filing Date: 2016-10-31 | Inventor： Siegert, Jörg Besling, Willem Frederik Adrianus Tak, Coenraad Cornelis Schrems, Martin Schrank, Franz | Assignee: Sciosense B.V. | IPC: G01L19/04 | ||||
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4 | US2021020511A1 |
METHOD OF FORMING A THROUGH-SUBSTRATE VIA AND A SEMICONDUCTOR DEVICE COMPRISING A THROUGH-SUBSTRATE VIA
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Publication/Patent Number: US2021020511A1 | Publication Date: 2021-01-21 | Application Number: 16/980,197 | Filing Date: 2019-04-03 | Inventor： Kraft, Jochen Parteder, Georg Jessenig, Stefan Schrank, Franz Siegert, Jörg | Assignee: ams AG | IPC: H01L21/768 | Abstract: A substrate is provided with a dielectric, a metal layer embedded in the dielectric, and a metallic layer arranged on the metal layer between the substrate and the metal layer. A via hole is formed in the substrate and in a region of the dielectric that is between the substrate and the metal layer. An insulation layer is applied in the via hole and removed from above a contact area of the metal layer, and the metallic layer is completely removed from the contact area. A metallization is applied in the via hole on the contact area. | |||
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5 | EP2573829B1 |
Light emitting diode module
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Publication/Patent Number: EP2573829B1 | Publication Date: 2020-04-22 | Application Number: 12198155.9 | Filing Date: 2007-10-16 | Inventor： Schrank, Franz Hoschopf, Hans | Assignee: Tridonic Jennersdorf GmbH Lumitech Patentverwertung GmbH | IPC: H01L33/48 | ||||
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6 | EP2573829B8 |
Light emitting diode module
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Publication/Patent Number: EP2573829B8 | Publication Date: 2020-06-10 | Application Number: 12198155.9 | Filing Date: 2007-10-16 | Inventor： Schrank, Franz Hoschopf, Hans | Assignee: Tridonic GmbH & Co. KG Lumitech Patentverwertung GmbH | IPC: H01L33/48 | ||||
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7 | US10734534B2 |
Method of producing an optical sensor at wafer-level and optical sensor
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Publication/Patent Number: US10734534B2 | Publication Date: 2020-08-04 | Application Number: 15/746,342 | Filing Date: 2016-07-22 | Inventor： Etschmaier, Harald Toschkoff, Gregor Bodner, Thomas Schrank, Franz | Assignee: ams AG | IPC: H01L31/0203 | Abstract: A method of producing an optical sensor at wafer-level, comprising the steps of providing a wafer having a main top surface and a main back surface and arrange at or near the top surface of the wafer at least one first integrated circuit having at least one light sensitive component. Furthermore, providing in the wafer at least one through-substrate via for electrically contacting the top surface and back surface and forming a first mold structure by wafer-level molding a first mold material over the top surface of the wafer, such that the first mold structure at least partly encloses the first integrated circuit. Finally, forming a second mold structure by wafer-level molding a second mold material over the first mold structure, such that the second mold structure at least partly encloses the first mold structure. | |||
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8 | US2020243387A1 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
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Publication/Patent Number: US2020243387A1 | Publication Date: 2020-07-30 | Application Number: 16/754,323 | Filing Date: 2018-10-11 | Inventor： Bodner, Thomas Jessenig, Stefan Schrank, Franz | Assignee: ams AG | IPC: H01L21/768 | Abstract: A method for manufacturing a semiconductor device comprises the steps of providing a semiconductor body with a main plane of extension, and forming a trench in the semiconductor body from a top side of the semiconductor body in a vertical direction which is perpendicular to the main plane of extension of the semiconductor body. The method further comprises the steps of coating inner walls of the trench with an isolation layer, depositing a metallization layer within the trench, and depositing a passivation layer within the trench such that an inner volume of the trench is free of any material, wherein inner surfaces that are adjacent to the inner volume are treated to be hydrophobic at least in places. Furthermore, a semiconductor device is provided. | |||
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9 | US10644047B2 |
Optoelectronic device with a refractive element and a method of producing such an optoelectronic device
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Publication/Patent Number: US10644047B2 | Publication Date: 2020-05-05 | Application Number: 16/069,802 | Filing Date: 2016-12-15 | Inventor： Hofrichter, Jens Schrank, Franz Siegert, Joerg | Assignee: ams AG | IPC: H01L27/146 | Abstract: A top surface of a substrate is provided with a detection element for detecting electromagnetic radiation. A refractive element is formed by a portion of a cover element, which is attached to the substrate, so that the refractive element is arranged facing the detection element. The refractive element may be arranged within a recess of the cover element, so that a cavity is formed between the detection element and the refraction element. | |||
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10 | EP3193368B1 |
AN OPTOELECTRONIC DEVICE WITH A REFRACTIVE ELEMENT AND A METHOD OF PRODUCING SUCH AN OPTOELECTRONIC DEVICE
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Publication/Patent Number: EP3193368B1 | Publication Date: 2020-03-18 | Application Number: 16151134.0 | Filing Date: 2016-01-13 | Inventor： Hofrichter, Jens Schrank, Franz Siegert, Jörg | Assignee: ams AG | IPC: H01L27/146 | ||||
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11 | EP2665096B1 |
A METHOD OF WAFER-SCALE INTEGRATION OF SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICE
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Publication/Patent Number: EP2665096B1 | Publication Date: 2020-04-22 | Application Number: 12168069.8 | Filing Date: 2012-05-15 | Inventor： Cassidy, Cathal Siegert, Jörg Schrank, Franz | Assignee: ams AG | IPC: H01L27/146 | ||||
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12 | EP3024029B1 |
Method of producing a semiconductor device comprising an aperture array
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Publication/Patent Number: EP3024029B1 | Publication Date: 2020-04-22 | Application Number: 14193859.7 | Filing Date: 2014-11-19 | Inventor： Siegert, Jörg Schrank, Franz Schrems, Martin | Assignee: ams AG | IPC: H01L27/146 | ||||
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13 | EP3660902A1 |
SEMICONDUCTOR DEVICE COMPRISING AN APERTURE ARRAY
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Publication/Patent Number: EP3660902A1 | Publication Date: 2020-06-03 | Application Number: 20152454.3 | Filing Date: 2014-11-19 | Inventor： Siegert, Jörg Schrank, Franz Schrems, Martin | Assignee: AMS AG | IPC: H01L27/146 | Abstract: A photosensor (2) is arranged in a semiconductor substrate (1) at a main surface (10), a dielectric layer (4) is arranged on or above the main surface, the dielectric layer including a metal layer (6) electrically connected with the photosensor, and an aperture layer (16) formed from an opaque or semitransparent material is arranged on or above the dielectric layer. The aperture layer is provided with an array of transparent aperture zones (18) above the photosensor, each of the aperture zones penetrating the aperture layer. | |||
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14 | EP3471132B1 |
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
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Publication/Patent Number: EP3471132B1 | Publication Date: 2020-02-26 | Application Number: 17196160.0 | Filing Date: 2017-10-12 | Inventor： Bodner, Thomas Jessenig, Stefan Schrank, Franz | Assignee: ams AG | IPC: H01L21/768 | ||||
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15 | EP2908335B1 |
Dicing method
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Publication/Patent Number: EP2908335B1 | Publication Date: 2020-04-15 | Application Number: 14155240.6 | Filing Date: 2014-02-14 | Inventor： Schrank, Franz Schrems, Martin Stering, Bernhard | Assignee: ams AG | IPC: H01L21/768 | ||||
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16 | US2020168772A1 |
LED/LD ILLUMINATION DEVICE WITH SEPARATE LUMINOPHORE CONFIGURATION, AND METHOD FOR PRODUCING SAME
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Publication/Patent Number: US2020168772A1 | Publication Date: 2020-05-28 | Application Number: 16/627,823 | Filing Date: 2018-05-24 | Inventor： Riemer, Steffen Schrank, Franz Uitz, Patrick Brugger, Wilhelm Irran, Thomas | Assignee: Tridonic Jennersdorf GmbH W&H Dentalwerk Bürmoos GmbH | IPC: H01L33/50 | Abstract: The invention relates to an illuminating device (1) comprising a substrate (2), a non-transparent spacer (4) which is connected to the substrate (2) so as to be hermetically sealed, an opening in the spacer (4), opposite said substrate (2), and an illumination element (3) positioned beneath the spacer (4) and beneath the opening, which element is connected to the substrate (2) so as to be hermetically sealed, characterized in that the opening in the spacer (4) is closed, so as to be hermetically sealed, by an optical element (5) consisting of a glass material the volume of which comprises at least one luminophore and thus constitutes a luminescent composite glass material. | |||
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17 | US10847664B2 |
Optical package and method of producing an optical package
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Publication/Patent Number: US10847664B2 | Publication Date: 2020-11-24 | Application Number: 15/773,539 | Filing Date: 2016-11-04 | Inventor： Mehrl, David Bodner, Thomas Toschkoff, Gregor Etschmaier, Harald Schrank, Franz | Assignee: AMS AG | IPC: H01L31/0232 | Abstract: An optical package is proposed comprising a carrier, an optoelectronic component, an aspheric lens, and a reflective layer. The carrier comprises electrical interconnections and the optoelectric component is arranged for emitting and/or detecting electromagnetic radiation in a specified wavelength range. Furthermore, the optoelectric component is mounted on the carrier or integrated into the carrier and electrically connected to the electric interconnections. The aspheric lens has an upper surface, a lateral surface, and a bottom surface and the bottom surface is arranged on or near the optoelectric component. The aspheric lens comprises a material which is at least transparent in the specified wavelength range. The reflective layer comprises a reflective material, wherein the reflective layer at least partly covers the lateral surface of the aspheric lens, and wherein the reflective material is at least partly reflective in the specified wavelength range. | |||
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18 | US202020611A1 |
Semiconductor Device
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Publication/Patent Number: US202020611A1 | Publication Date: 2020-01-16 | Application Number: 20/181,648 | Filing Date: 2018-02-14 | Inventor： Singulani, Anderson Kraft, Jochen Parteder, Georg Coppeta, Raffaele Schrank, Franz | Assignee: ams AG | IPC: H01L23/528 | Abstract: A semiconductor device comprises a semiconductor body and an electrically conductive via which extends through at least a part of the semiconductor body, where the via has a lateral size which is given in a first lateral direction that is perpendicular to a vertical direction given by the main axis of extension of the via and where the via has a top side and a bottom side that faces away from the top side. The semiconductor device further comprises an electrically conductive etch-stop layer arranged at the bottom side of the via in a plane which is parallel to the first lateral direction, and at least one electrically conductive contact layer at the bottom side of the via in a plane which is parallel to the first lateral direction. The lateral extent in the first lateral direction of the etch-stop layer is larger than the lateral size of the via and the lateral extent in the first lateral direction of the contact layer is smaller than the lateral size of the via. Furthermore, the etch-stop layer is arranged between the electrically conductive via and the contact layer in the vertical direction. | |||
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19 | EP3651680A1 |
LED/LD ILLUMINATION DEVICE WITH SEPARATE LUMINOPHORE CONFIGURATION, AND METHOD FOR PRODUCING SAME
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Publication/Patent Number: EP3651680A1 | Publication Date: 2020-05-20 | Application Number: 18727772.8 | Filing Date: 2018-05-24 | Inventor： Riemer, Steffen Schrank, Franz Uitz, Patrick Brugger, Wilhelm Irran, Thomas | Assignee: Tridonic Jennersdorf GmbH W & H Dentalwerk Bürmoos GmbH | IPC: A61C1/08 | ||||
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20 | US2020020611A1 |
Semiconductor Device
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Publication/Patent Number: US2020020611A1 | Publication Date: 2020-01-16 | Application Number: 16/483,884 | Filing Date: 2018-02-14 | Inventor： Kraft, Jochen Parteder, Georg Singulani, Anderson Coppeta, Raffaele Schrank, Franz | Assignee: ams AG | IPC: H01L23/48 | Abstract: A semiconductor device comprises a semiconductor body and an electrically conductive via which extends through at least a part of the semiconductor body, where the via has a lateral size which is given in a first lateral direction that is perpendicular to a vertical direction given by the main axis of extension of the via and where the via has a top side and a bottom side that faces away from the top side. The semiconductor device further comprises an electrically conductive etch-stop layer arranged at the bottom side of the via in a plane which is parallel to the first lateral direction, and at least one electrically conductive contact layer at the bottom side of the via in a plane which is parallel to the first lateral direction. The lateral extent in the first lateral direction of the etch-stop layer is larger than the lateral size of the via and the lateral extent in the first lateral direction of the contact layer is smaller than the lateral size of the via. Furthermore, the etch-stop layer is arranged between the electrically conductive via and the contact layer in the vertical direction. |
3.Current Quota