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No. Publication Number Title Publication/Patent Number Publication/Patent Number Publication Date Publication Date
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1
US2021040943A1
PUMPING STRUCTURE, PARTICLE DETECTOR AND METHOD FOR PUMPING
Publication/Patent Number: US2021040943A1 Publication Date: 2021-02-11 Application Number: 16/967,828 Filing Date: 2019-02-01 Inventor: Coppeta, Raffaele   Brivio, Jacopo   Pires, Singulani Anderson   Vescoli, Verena   Assignee: ams AG   IPC: F04B43/04 Abstract: A pumping structure comprises at least two membranes, at least two actuation chambers, one evaluation chamber comprising an opening to the outside of the pumping structure, and at least three electrodes. Each membrane is arranged between two electrodes in a vertical direction which is perpendicular to the main plane of extension of the pumping structure, each actuation chamber is arranged between one of the membranes and one of the electrodes in vertical direction, and each actuation chamber is connected to the evaluation chamber via a channel. Furthermore, a particle detector and a method for pumping are provided.
2
EP3779391A1
SENSOR ARRANGEMENT AND METHOD FOR FABRICATING A SENSOR ARRANGEMENT
Publication/Patent Number: EP3779391A1 Publication Date: 2021-02-17 Application Number: 19191794.7 Filing Date: 2019-08-14 Inventor: Besling, Willem Frederik Adrianus   Singulani, Anderson   Tak, Coenraad Cornelis   Van, Der Avoort Casper   Assignee: Sciosense B.V.   IPC: G01L19/14 Abstract: A sensor arrangement (10) comprises a sensor die (11), an interposer (12) and a support (13). The sensor die (11) comprises a contact area (14), a suspended area (15) and a sensitive element (16) located in the suspended area (15). The interposer (12) comprises at least two vias (48, 49) connecting a first side (46) of the interposer (12) to a second side (47) of the interposer (12). The support (13) mechanically and electrically connects the contact area (14) of the sensor die (11) to the first side (46) of the interposer (12) and comprises at least two contact joints (30 to 35).
3
EP3724633A1
INTEGRATED THERMOPHORETIC PARTICULATE MATTER SENSORS
Publication/Patent Number: EP3724633A1 Publication Date: 2020-10-21 Application Number: 18825619.2 Filing Date: 2018-12-13 Inventor: Singulani, Anderson   Roehrer, Georg   Assignee: AMS AG   IPC: G01N15/06
4
US10723615B2
Sensor assembly and arrangement and method for manufacturing a sensor assembly
Publication/Patent Number: US10723615B2 Publication Date: 2020-07-28 Application Number: 16/098,230 Filing Date: 2017-05-05 Inventor: Etschmaier, Harald   Singulani, Anderson   Assignee: Sciosense B.V.   IPC: B81B7/00 Abstract: A sensor assembly for being mounted on a circuit board comprises an interposer with at least one opening extending between a first and a second main surface of the interposer. The interposer comprises at least two stress decoupling elements, each comprising a flexible structure formed by a respective portion of the interposer being partially enclosed by one of the at least one opening. A sensor die is connected to the flexible structures on the first main surface. At least two board connection elements are arranged on the first main surface and adapted for connecting the assembly to the circuit board.
5
US2020393351A1
INTEGRATED PARTICULATE MATTER SENSOR SYSTEMS
Publication/Patent Number: US2020393351A1 Publication Date: 2020-12-17 Application Number: 16/772,453 Filing Date: 2018-12-13 Inventor: Etschmaier, Harald   Roehrer, Georg   Singulani, Anderson   Bergmann, Alexander   Assignee: ams International AG   Technische Universität Graz   IPC: G01N15/06 Abstract: A particulate matter sensor system for sensing particulate matter in a fluid includes a substrate and a cover disposed on the substrate. The cover defines at least a portion of a flow path through the microfluidic system. The sensor system includes a particulate matter sensor disposed in an interior space between the cover and the substrate. The particulate matter sensor includes an integrated sensor device electrically connected to the substrate. The flow path is defined through the particulate matter sensor. The sensor system includes a fluid circulation device disposed in the interior space between the cover and the substrate and configured to cause fluid to flow along the flow path through the microfluidic system.
6
EP3527826B1
PUMPING STRUCTURE, PARTICLE DETECTOR AND METHOD FOR PUMPING
Publication/Patent Number: EP3527826B1 Publication Date: 2020-07-08 Application Number: 18157175.3 Filing Date: 2018-02-16 Inventor: Coppeta, Raffaele   Brivio, Jacopo   Singulani, Anderson   Vescoli, Verena   Assignee: ams AG   IPC: F04B43/02
7
EP3724634A1
INTEGRATED PARTICULATE MATTER SENSOR SYSTEMS
Publication/Patent Number: EP3724634A1 Publication Date: 2020-10-21 Application Number: 18825620.0 Filing Date: 2018-12-13 Inventor: Etschmaier, Harald   Roehrer, Georg   Singulani, Anderson   Bergmann, Alexander   Assignee: ams International AG   Technische Universität Graz   IPC: G01N15/06
8
US202020611A1
Semiconductor Device
Publication/Patent Number: US202020611A1 Publication Date: 2020-01-16 Application Number: 20/181,648 Filing Date: 2018-02-14 Inventor: Singulani, Anderson   Kraft, Jochen   Parteder, Georg   Coppeta, Raffaele   Schrank, Franz   Assignee: ams AG   IPC: H01L23/528 Abstract: A semiconductor device comprises a semiconductor body and an electrically conductive via which extends through at least a part of the semiconductor body, where the via has a lateral size which is given in a first lateral direction that is perpendicular to a vertical direction given by the main axis of extension of the via and where the via has a top side and a bottom side that faces away from the top side. The semiconductor device further comprises an electrically conductive etch-stop layer arranged at the bottom side of the via in a plane which is parallel to the first lateral direction, and at least one electrically conductive contact layer at the bottom side of the via in a plane which is parallel to the first lateral direction. The lateral extent in the first lateral direction of the etch-stop layer is larger than the lateral size of the via and the lateral extent in the first lateral direction of the contact layer is smaller than the lateral size of the via. Furthermore, the etch-stop layer is arranged between the electrically conductive via and the contact layer in the vertical direction.
9
US2020020611A1
Semiconductor Device
Publication/Patent Number: US2020020611A1 Publication Date: 2020-01-16 Application Number: 16/483,884 Filing Date: 2018-02-14 Inventor: Kraft, Jochen   Parteder, Georg   Singulani, Anderson   Coppeta, Raffaele   Schrank, Franz   Assignee: ams AG   IPC: H01L23/48 Abstract: A semiconductor device comprises a semiconductor body and an electrically conductive via which extends through at least a part of the semiconductor body, where the via has a lateral size which is given in a first lateral direction that is perpendicular to a vertical direction given by the main axis of extension of the via and where the via has a top side and a bottom side that faces away from the top side. The semiconductor device further comprises an electrically conductive etch-stop layer arranged at the bottom side of the via in a plane which is parallel to the first lateral direction, and at least one electrically conductive contact layer at the bottom side of the via in a plane which is parallel to the first lateral direction. The lateral extent in the first lateral direction of the etch-stop layer is larger than the lateral size of the via and the lateral extent in the first lateral direction of the contact layer is smaller than the lateral size of the via. Furthermore, the etch-stop layer is arranged between the electrically conductive via and the contact layer in the vertical direction.
10
EP3629598A1
INTEGRATED OPTICAL TRANSDUCER AND METHOD FOR FABRICATING AN INTEGRATED OPTICAL TRANSDUCER
Publication/Patent Number: EP3629598A1 Publication Date: 2020-04-01 Application Number: 18196907.2 Filing Date: 2018-09-26 Inventor: Stojanovic, Goran   Steele, Colin   Lous, Erik Jan   Singulani, Anderson   Assignee: ams AG   IPC: H04R23/00 Abstract: An integrated optical transducer (2) for detecting dynamic pressure changes comprises a micro-electro-mechanical system, MEMS, die (10) having a MEMS diaphragm (12) with a first side (13) exposed to the dynamic pressure changes and a second side (14). The transducer (2) further comprises an application specific integrated circuit, ASIC, die (11) having an evaluation circuit configured to detect a deflection of the MEMS diaphragm (12), in particular of the second side (14) of the MEMS diaphragm (12). The MEMS die (10) is arranged with respect to the ASIC die (11) such that a gap with a gap height is formed between the second side (14) of the diaphragm (12) and a first surface (19) of the ASIC die (11) and the MEMS diaphragm (12), the ASIC die (11) and a suspension structure (15) of the MEMS die (10) delineate a back volume (4) of the integrated optical transducer (2).
11
EP3629597A1
MEMS MICROPHONE ASSEMBLY AND METHOD FOR FABRICATING A MEMS MICROPHONE ASSEMBLY
Publication/Patent Number: EP3629597A1 Publication Date: 2020-04-01 Application Number: 18196920.5 Filing Date: 2018-09-26 Inventor: Stojanovic, Goran   Steele, Colin   Mueller, Simon   Fröhlich, Thomas   Lous, Erik Jan   Singulani, Anderson   Assignee: ams AG   IPC: H04R19/00 Abstract: A micro-electro-mechanical system, MEMS, microphone assembly comprises an enclosure (10) defining a first cavity (11), and a MEMS microphone (20) arranged inside the first cavity (11). The microphone (20) comprises a first die (21) with bonding structures (23) and a MEMS diaphragm (24), and a second die (22) having an application specific integrated circuit, ASIC. The second die (22) is bonded to the bonding structures (23) such that a gap (28) is formed between a first side (25) of the diaphragm (24) and the second die (22), with the gap (28) defining a second cavity (31). The first side (25) of the diaphragm (24) is interfacing with the second cavity (31) and a second side (26) of the diaphragm (24) is interfacing with the environment (2) via an acoustic inlet port (12) of the enclosure (10). The bonding structures (23) are arranged such that pressure ventilation openings (30) are formed that connect the first cavity (11) and the second cavity (31).
12
EP3724628A1
INTEGRATED FILTER-BASED PARTICULATE MATTER SENSORS
Publication/Patent Number: EP3724628A1 Publication Date: 2020-10-21 Application Number: 18825621.8 Filing Date: 2018-12-13 Inventor: Etschmaier, Harald   Roehrer, Georg   Singulani, Anderson   Enichlmair, Hubert   Park, Jong-mun   Bergmann, Alexander   Maierhofer, Paul   Assignee: ams International AG   Technische Universität Graz   IPC: G01N1/22
13
EP3742757A1
OPTICAL TRANSDUCER AND METHOD FOR MEASURING DISPLACEMENT
Publication/Patent Number: EP3742757A1 Publication Date: 2020-11-25 Application Number: 19175935.6 Filing Date: 2019-05-22 Inventor: Dekker, Ronald   Heideman, Rene   Leinse, Arne   Lazar, Catalin   Nevou, Laurent   Steele, Colin   Pires, Singulani Anderson   Stojanovic, Goran   Mueller, Simon   Assignee: ams International AG   IPC: H04R23/00 Abstract: An integrated optical transducer (1) for measuring displacement of a diaphragm (10) comprises the diaphragm (10), a lens element (23) and a substrate body (20) having a waveguide structure (21) and a coupling element (22). The diaphragm (10) is arranged distant from the substrate body (20) and substantially parallel to a main extension plane of the substrate body (20). The waveguide structure (21) is configured to guide light from a light source (30) to the coupling element (22) and from the coupling element (22) to a photodetector (31). The coupling element (22) is configured to couple at least part of the light in the waveguide structure (21) onto a light path between the coupling element (22) and the diaphragm (10) and to couple light reflected by a surface of the diaphragm (10) from the light path into the waveguide structure (21). The lens element (23) is arranged on the light path such that light on the light path passes through the lens element (23)
14
US2020400544A1
INTEGRATED FILTER-BASED PARTICULATE MATTER SENSORS
Publication/Patent Number: US2020400544A1 Publication Date: 2020-12-24 Application Number: 16/772,457 Filing Date: 2018-12-13 Inventor: Etschmaier, Harald   Roehrer, Georg   Singulani, Anderson   Enichlmair, Hubert   Park, Jong-mun   Bergmann, Alexander   Maierhofer, Paul   Assignee: ams International AG   Technische Universität Graz   IPC: G01N15/06 Abstract: An apparatus for sensing particulate matter in a fluid includes a substrate; and an integrated circuit electrically connected to the substrate, the integrated circuit including a photodetector. The apparatus includes a filter assembly including a particle filter aligned with the photodetector, and a filter housing for the particle filter, the filter housing defining a flow path for fluid through the particle filter. The apparatus includes a light source electrically connected to the substrate and positioned to illuminate the particle filter.
15
WO2019115688A1
INTEGRATED THERMOPHORETIC PARTICULATE MATTER SENSORS
Publication/Patent Number: WO2019115688A1 Publication Date: 2019-06-20 Application Number: 2018084753 Filing Date: 2018-12-13 Inventor: Roehrer, Georg   Singulani, Anderson   Assignee: AMS AG   IPC: G01N15/06 Abstract: An apparatus for sensing particulate matter in a fluid includes a first substrate; and a sensing device electrically integrated with the first substrate, the sensing device having a receiving surface. The apparatus includes a second substrate separated from the first substrate by a gap. The apparatus includes a heating element disposed in the gap between the first substrate and the second substrate and connected to the second substrate by a post. The heating element is aligned with the receiving surface of the sensing device, and a microfluidic channel is defined between the first substrate and the heating element.
16
TW201934981A
Integrated thermophoretic particulate matter sensors
Publication/Patent Number: TW201934981A Publication Date: 2019-09-01 Application Number: 107145078 Filing Date: 2018-12-13 Inventor: Roehrer, Georg   Singulani, Anderson   Assignee: AMS AG   IPC: G01N15/06 Abstract: An apparatus for sensing particulate matter in a fluid includes a first substrate; and a sensing device electrically integrated with the first substrate, the sensing device having a receiving surface. The apparatus includes a second substrate separated from the first substrate by a gap. The apparatus includes a heating element disposed in the gap between the first substrate and the second substrate and connected to the second substrate by a post. The heating element is aligned with the receiving surface of the sensing device, and a microfluidic channel is defined between the first substrate and the heating element.
17
US2019161340A1
SENSOR ASSEMBLY AND ARRANGEMENT AND METHOD FOR MANUFACTURING A SENSOR ASSEMBLY
Publication/Patent Number: US2019161340A1 Publication Date: 2019-05-30 Application Number: 16/098,230 Filing Date: 2017-05-05 Inventor: Etschmaier, Harald   Singulani, Anderson   Assignee: ams AG   IPC: B81B7/00 Abstract: A sensor assembly for being mounted on a circuit board comprises an interposer with at least one opening extending between a first and a second main surface of the interposer. The interposer comprises at least two stress decoupling elements, each comprising a flexible structure formed by a respective portion of the interposer being partially enclosed by one of the at least one opening. A sensor die is connected to the flexible structures on the first main surface. At least two board connection elements are arranged on the first main surface and adapted for connecting the assembly to the circuit board.
18
EP3527826A1
PUMPING STRUCTURE, PARTICLE DETECTOR AND METHOD FOR PUMPING
Publication/Patent Number: EP3527826A1 Publication Date: 2019-08-21 Application Number: 18157175.3 Filing Date: 2018-02-16 Inventor: Coppeta, Raffaele   Brivio, Jacopo   Singulani, Anderson   Vescoli, Verena   Assignee: ams AG   IPC: F04B43/02 Abstract: A pumping structure (20) comprises at least two membranes (21), at least two actuation chambers (22), one evaluation chamber (23) comprising an opening (24) to the outside of the pumping structure (20), and at least three electrodes (25). Each membrane (21) is arranged between two electrodes (25) in a vertical direction (z) which is perpendicular to the main plane of extension of the pumping structure (20), each actuation chamber (22) is arranged between one of the membranes (21) and one of the electrodes (25) in vertical direction (z), and each actuation chamber (22) is connected to the evaluation chamber (23) via a channel (26). Furthermore, a particle detector (27) and a method for pumping are provided.
19
WO2019158377A1
PUMPING STRUCTURE, PARTICLE DETECTOR AND METHOD FOR PUMPING
Publication/Patent Number: WO2019158377A1 Publication Date: 2019-08-22 Application Number: 2019052534 Filing Date: 2019-02-01 Inventor: Vescoli, Verena   Singulani, Anderson   Coppeta, Raffaele   Brivio, Jacopo   Assignee: AMS AG   IPC: F04B43/02 Abstract: A pumping structure (20) comprises at least two membranes (21), at least two actuation chambers (22), one evaluation chamber (23) comprising an opening (24) to the outside of the pumping structure (20), and at least three electrodes (25). Each membrane (21) is arranged between two electrodes (25) in a vertical direction (z) which is perpendicular to the main plane of extension of the pumping structure (20), each actuation chamber (22) is arranged between one of the membranes (21) and one of the electrodes (25) in vertical direction (z), and each actuation chamber (22) is connected to the evaluation chamber (23) via a channel (26). Furthermore, a particle detector (27) and a method for pumping are provided.
20
WO2019115689A1
INTEGRATED PARTICULATE MATTER SENSOR SYSTEMS
Publication/Patent Number: WO2019115689A1 Publication Date: 2019-06-20 Application Number: 2018084757 Filing Date: 2018-12-13 Inventor: Bergmann, Alexander   Roehrer, Georg   Singulani, Anderson   Etschmaier, Harald   Assignee: TECHNISCHE UNIVERSITAET GRAZ   AMS INTERNATIONAL AG   IPC: G01N15/00 Abstract: A particulate matter sensor system for sensing particulate matter in a fluid includes a substrate and a cover disposed on the substrate. The cover defines at least a portion of a flow path through the microfluidic system. The sensor system includes a particulate matter sensor disposed in an interior space between the cover and the substrate. The particulate matter sensor includes an integrated sensor device electrically connected to the substrate. The flow path is defined through the particulate matter sensor. The sensor system includes a fluid circulation device disposed in the interior space between the cover and the substrate and configured to cause fluid to flow along the flow path through the microfluidic system.
Total 2 pages